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X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

A high-voltage electrode and electron beam generator technology, applied in the field of x-ray sources, can solve the problem of not producing x-ray sources and the like

Active Publication Date: 2016-03-09
NIKON METROLOGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, practically no suitably high-energy x-ray sources have been produced commercially

Method used

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  • X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
  • X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal
  • X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

Examples

Experimental program
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Embodiment Construction

[0108] Basic structure and general principles

[0109] X-rays can be produced by irradiating a target composed of a material containing a large proportion of high atomic number atoms or ions with a suitable high energy electron beam. An electron beam is produced by accelerating electrons across a large potential difference and then directing the beam to a target. Electrons in the electron beam interact with the electric field of the high atomic number nuclei and emit x-ray photons through the process of bremsstrahlung. Thus, the generated x-rays have a continuum with an upper energy limit determined by the energy of the incident photon.

[0110] However, in the exemplary electron beam case of 100 keV, typically only 1% of the incident electron beam energy is converted to x-ray radiation; the remainder of the incident electron beam energy is deposited as heat in the target. Although the proportion of the beam energy that is converted to x-ray radiation increases with increasi...

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PUM

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Abstract

Disclosed herein are a high-voltage generator (120) for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target (500), and an x-ray source. These various aspects may separately and / or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerised tomography. In particular, the high-voltage generator includes a shield electrode (123a, 123b) electrically connected intermediate of a first voltage multiplier (122a, 122b) and a second voltage multiplier (122b, 122c). The electron beam apparatus includes control photodetectors (202a, 202b - not shown) and photo emitters (201a, 202a) having a transparent conductive shield (203a and 203b, 203c - not shown) arranged therebetween. The rotary vacuum seal includes a pumpable chamber (302) at a position intermediate between high-pressure and low- pressure ends of a bore (301) for a rotating shaft (401). The rotary target assembly is configured such that when a torque between a bearing housing (403) and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target (500) has a plurality of target plates (560) supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x- ray gun is provided with a shield electrode (123a) maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.

Description

technical field [0001] The present invention relates to an x-ray source, and more particularly to a high voltage generator, an electron beam gun, a rotating target assembly, a rotating target and a rotating vacuum seal therefor. Background technique [0002] X-ray imaging is an invaluable tool for research, industrial and medical applications. By illuminating a target object with x-ray radiation and by detecting the x-rays transmitted through the object, an image of the internal structure of the object can be obtained. [0003] The image allows identifying those parts of the object which attenuate the passage of x-rays relatively more and those parts which attenuate the passage of x-rays relatively less. In general, denser materials and those containing a high proportion of high atomic number atoms or ions tend to block the passage of x-rays to a relatively greater extent. In addition, the greater the total path length traveled by x-rays in the target object, the greater t...

Claims

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Application Information

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IPC IPC(8): H01J35/02H01J35/04H01J35/10H05G1/12H02M7/10
CPCH01J35/025H01J35/04H01J35/106H01J35/108H02M1/32H02M7/106H05G1/12F16C33/768F16C35/042F16J15/16H01J35/116H01J2235/1046H01J2235/20H01J2235/1204H01J2235/1262H01J2235/0236H01J2235/086H01J2235/083H01J35/1024H01J35/066H01J29/48H01J35/045H05G1/10H01J35/16H01J37/065H01J2237/2482
Inventor R·哈德兰德
Owner NIKON METROLOGY
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