A hydrogen sensor based on carbon nanotube and palladium composite film

A carbon nanotube and composite film technology, which is applied in the field of hydrogen sensors, can solve the problem that the time of the hydrogen sensor cannot meet the demand, etc., and achieve the effects of easy mass production, selectivity assurance, and improved responsiveness.

Inactive Publication Date: 2018-09-07
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

[0008] The purpose of the present invention is to provide a hydrogen sensor based on carbon nanotubes and palladium composite films, to solve the problem in the prior art that the response time of hydrogen sensors made of carbon nanotubes still cannot meet the demand

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  • A hydrogen sensor based on carbon nanotube and palladium composite film
  • A hydrogen sensor based on carbon nanotube and palladium composite film

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Embodiment Construction

[0023] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0024] figure 1 with figure 2 An embodiment of a hydrogen sensor based on carbon nanotubes and palladium composite films of the present invention is shown: a hydrogen sensor based on carbon nanotubes and palladium composite films, which includes a P-type silicon substrate 4, carbon nano Tube 3, metal palladium thin film 2 and two metal electrodes 1, wherein the carbon nanotubes 3 are arranged vertically and horizontally evenly, and the two metal electrodes 1 are strip-shaped and arranged symmetrically to each other On the upper surface of metal palladium thin film 2.

[0025] The metal palladiu...

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Abstract

The invention relates to new energy-sensitive materials, in particular to a hydrogen sensor based on carbon nanotubes and palladium composite films, which sequentially includes a P-type silicon substrate (4), carbon nanotubes (3), and a metal palladium film (2) from inside to outside and two metal electrodes (1), wherein the carbon nanotubes (3) are arranged vertically and horizontally evenly, and the two metal electrodes (1) are strip-shaped and arranged symmetrically on the metal Palladium film (2) upper surface. The textured carbon nanotubes used in the present invention can effectively improve the hydrogen absorption performance of the metal palladium film, reduce the response time of the hydrogen sensor, and improve the responsivity of the hydrogen sensor; at the same time, the selectivity of the device is also guaranteed; in addition, the present invention can be used in It works at room temperature; moreover, the fabrication process of the device is simple and easy for large-scale production.

Description

technical field [0001] The invention relates to new energy sensitive materials, in particular to a hydrogen sensor based on carbon nanotubes and palladium composite films. Background technique [0002] With the development of society and the continuous improvement of the people's economic level, people's demand for materials is getting higher and higher, which urgently requires the country's industrialization level to continue to improve, and the sustainable development strategy has also been incorporated into the daily life of the country and the people. For the good implementation of the sustainable development strategy, its key issues in the energy field are urgent problems to be solved. With the gradual intensification of wars in the Middle East, oil resources can no longer be relied on by countries. Therefore, finding ideal clean energy with high combustion efficiency becomes the key to sustainable development. [0003] Considering that the exploitation of shale gas i...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/12
CPCG01N27/12G01N27/125
Inventor 吴双红周寒孙铭徽魏雄邦李世彬陈志
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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