Silk-screen printing type self-referencing-graphene field effect transistor biochemical sensor

Abstract

The invention creates and provides a silk-screen printing type self-referencing-graphene field effect transistor biochemical sensor. The graphene field effect transistor biochemical sensor is prepared by adopting a silk-screen printing technology, not only has the device advantages of a graphene field effect transistor, but also can meet the requirement for detection on three electrodes of a biochemical sensor in a liquid environment, and is simple in process and low in cost; moreover, the self-referencing structural design is different from an existing liquid gate graphene field effect transistor, adopts a design scheme of integrating a reference electrode and the graphene field effect transistor into one whole body, and has the advantages of all solid state and easiness for operation; and finally, due to adoption of a process of respectively carrying out carboxylation and amination processing on a graphene material and a substrate, the silk-screen printing type self-referencing-graphene field effect transistor biochemical sensor is beneficial for improving stability of a device.

Description

technical field [0001] The invention belongs to the field of biochemical sensors, and in particular relates to a device structure and process design. Background technique [0002] Field-effect transistors are the most widely used components in electronic products, and the generation and application of these devices are of epoch-making significance. Its appearance has triggered a huge revolution in the electronics industry. The application and development of this component in electronic products has made integrated circuits possible, and the miniaturization of electronic components has become a trend. The first generation of applicable field effect transistors is a metal-oxide-semiconductor field effect transistor based on single crystal silicon, which is called a metal-oxide-semiconductor field effect transistor (MOSFET for short). Bell Labs produced the first MOSFET in 1960. MOSFETs play a vital role in modern memory components and integrated circuit memory computer proce...

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Problems solved by technology

[0007] In summary, searching the literature found that there is an important problem in the existing liquid gate graphene field effect transistor preparation methods: the reference electrode 4 in the liquid gate graphene field effect transistor cannot be connected with the graphene film 2, the source electrode 5, and the drain electrode. The pole 6 becomes one, which leads to the unfixed distance between the reference electrode 4 and the graphene film 2 in the actual biochemical detection, which affects the measurement results

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