Two-axis precision movement platform for X-ray diffraction instrument

Abstract

The invention provides a two-axis precision movement platform for an X-ray diffraction instrument, and belongs to the field of X-ray and multi-axis precision movement platforms. Two piezoelectric linear motors arranged in parallel in the Z direction are adopted to push a test piece workbench, Z-direction movement of the test piece workbench is produced through synchronous movement of the two Z-direction piezoelectric linear motors, two Hall sensors are adopted as displacement detection elements of the two Z-direction piezoelectric linear motors respectively, and a spring and a connecting rod are used for pretightening the contact portions of motor rods of the piezoelectric linear motors and the test piece workbench and the hinged portions of the test piece workbench and an Z-direction sliding block. The two-axis precision movement platform has the advantages that the precision piezoelectric linear motors are adopted as the driving components, the movement distance is long, response is rapid, and positioning precision is high; the Hall sensors are used for providing limiting signals and initial position signals, and movement parts are prevented from exceeding the movement range. The two-axis precision movement platform is applicable to movement and multi-angle irradiation analysis of test pieces in X-ray diffraction analysis.

Description

technical field [0001] The invention belongs to the field of X-ray and multi-axis precision motion platforms, in particular to a two-axis precision motion platform for X-ray diffractometers. Background technique [0002] X-ray diffraction imaging is an important technical means of fine structure imaging. When a substance is subjected to diffraction analysis, the substance is irradiated by X-rays to produce different degrees of diffraction phenomena. Substances produce characteristic diffraction patterns. The X-ray diffraction method has the advantages of no damage to the sample, no pollution, fast, high measurement accuracy, and a large amount of information about the integrity of the crystal can be obtained. [0003] The precision multi-axis motion platform is an important part of the X-ray diffraction imaging system and an important tool for the multi-axis motion and multi-angle detection of the workpiece. With the rapid development of communication engineering, precisio...

AI Technical Summary

Problems solved by technology

[0004] The invention provides a two-axis precision motion platform for X-ray diffractometers to solve the problems of large volume, low motion precision, low integration and low accuracy retention of the motion platforms currently used for X-ray diffractometers.

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