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Graphite boat carrying apparatus and interconnection type graphite boat loading and unloading sheet production line

A carrier device and graphite boat technology, applied in transportation and packaging, electrical components, semiconductor/solid-state device manufacturing, etc., can solve problems such as safety hazards, affecting processes, reducing work efficiency, etc., and achieve reliable installation and positioning, simple structure Effect

Active Publication Date: 2016-05-25
48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the entry and exit process of the graphite boat on the PECVD equipment is mainly completed manually, and the graphite boat cannot be docked with the PECVD equipment and the positioning device of the graphite boat loading and unloading system
In actual operation, the graphite boat needs to be moved and fixed manually, and the work efficiency is limited, and manual handling for a long time will easily bring safety hazards and increase the risk of silicon wafers falling from the graphite boat during the handling process.
In addition, manual inspection is required to check whether the silicon wafers in each slot of the existing graphite boat are intact, not broken or dropped, which greatly reduces the operating efficiency of the work. When the boat is at the bottom, it will affect the follow-up process

Method used

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  • Graphite boat carrying apparatus and interconnection type graphite boat loading and unloading sheet production line
  • Graphite boat carrying apparatus and interconnection type graphite boat loading and unloading sheet production line
  • Graphite boat carrying apparatus and interconnection type graphite boat loading and unloading sheet production line

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Embodiment Construction

[0028] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0029] Figure 1 to Figure 3 An embodiment of a graphite boat carrying device of the present invention is shown, which includes a supporting pallet 1, axial stoppers 4 and axial locking parts 5 respectively arranged at both ends of the supporting pallet 1, and the supporting pallet 1 Arranged horizontally along the length of the graphite boat, the axial locking part 5 can be far away from or close to the axial limiting block 4, and the bearing plate 1 is fixed at intervals between the axial limiting block 4 and the axial locking part 5 A plurality of support bars 2, each support bar 2 is arranged along the width direction of the graphite boat and both ends protrude outward, and the two protruding ends of each support bar 2 are respectively provided with limit stops 3. During installation, the graphite boat is placed on the supporting...

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PUM

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Abstract

The invention discloses a graphite boat carrying apparatus and an interconnection type graphite boat loading and unloading sheet production line. The graphite boat carrying apparatus comprises a carrying supporting plate, and an axial limiting block and an axial locking part that are arranged at the two ends of the carrying supporting plate separately; the carrying supporting plate is horizontally arranged in the length direction of the graphite boat; the axial locking part can be far from or close to the axial limiting block; multiple supporting strips are fixedly arranged on the carrying supporting plate between the axial limiting block and the axial locking part at intervals; each supporting strip is arranged in the width direction of the graphite boat, and the two ends of each supporting strip extend outwardly; and limit stops are arranged at the two extension ends of each supporting strip separately. The graphite boat carrying apparatus and the interconnection type graphite boat loading and unloading sheet production line have the advantages that the production efficiency is greatly improved, the labor intensity is lowered, and the like.

Description

technical field [0001] The invention relates to a solar cell manufacturing technology, in particular to a graphite boat carrying device and an interconnected graphite boat loading and unloading production line. Background technique [0002] With the rapid development of the global photovoltaic industry, China's photovoltaic industry has attracted more and more attention. As a leading product in the photovoltaic industry, silicon monocrystalline solar cells have attracted more and more attention, and the related production technology and production equipment have also been developed rapidly. In recent years, in order to further reduce the manufacturing cost of solar cells, major photovoltaic companies in the world have continuously developed and innovated the production process equipment of solar cells. Among them, automatic production equipment to reduce the personnel demand of the solar cell production line and improve the automation level of the production line is an impo...

Claims

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Application Information

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IPC IPC(8): H01L21/677H01L21/687
CPCH01L21/67706H01L21/6773H01L21/67736H01L21/68714
Inventor 蒋超贾京英吕文利郭忠君隋红林
Owner 48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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