Graphite boat carrying apparatus and interconnection type graphite boat loading and unloading sheet production line
A carrier device and graphite boat technology, applied in transportation and packaging, electrical components, semiconductor/solid-state device manufacturing, etc., can solve problems such as safety hazards, affecting processes, reducing work efficiency, etc., and achieve reliable installation and positioning, simple structure Effect
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[0028] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0029] Figure 1 to Figure 3 An embodiment of a graphite boat carrying device of the present invention is shown, which includes a supporting pallet 1, axial stoppers 4 and axial locking parts 5 respectively arranged at both ends of the supporting pallet 1, and the supporting pallet 1 Arranged horizontally along the length of the graphite boat, the axial locking part 5 can be far away from or close to the axial limiting block 4, and the bearing plate 1 is fixed at intervals between the axial limiting block 4 and the axial locking part 5 A plurality of support bars 2, each support bar 2 is arranged along the width direction of the graphite boat and both ends protrude outward, and the two protruding ends of each support bar 2 are respectively provided with limit stops 3. During installation, the graphite boat is placed on the supporting...
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