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A cryogenic vacuum pump

A low-temperature vacuum and vacuum cover technology, which is applied in the direction of pumps, pump components, variable displacement pump components, etc., can solve the problems that cannot meet the requirements, and achieve the effects of long service life, safe use and high structural strength

Active Publication Date: 2018-11-16
WUHU HUANQIU AUTO PARTS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The traditional "oil pump" vacuum system cannot meet the requirements no matter in terms of cleanliness requirements or ultimate vacuum requirements

Method used

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  • A cryogenic vacuum pump

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] refer to figure 1 As shown, a cryogenic vacuum pump includes a flange 1, a pump body 2, a first condensing fin group 3 and a second condensing fin group 4, the flange 1 is arranged on the top of the pump body 2, and the flange 1 Welded with the pump body 2, the first condensing fin group 3 and the second condensing fin group 4 are arranged in the pump body 2, the first condensing fin group 3 is distributed horizontally, and the second condensing fin group The group 4 is vertically distributed, and a vacuum cover 5 is installed on the outside of the second condensing fin group 4, and the vacuum cover 5 is fixedly connected with the pump body 2, and the bottom of the pump body 2 is provided with a refrigerator 6, and the first A second-stage cold head 7 is installed in the middle of the condensing fin group 3, and a first-stage cold head 8 is installed below the vacuum cover 5. The second-stage cold head 7, the first-stage cold head 8, and the refrigerator 6 are sequentia...

Embodiment 2

[0026] refer to figure 1 As shown, a cryogenic vacuum pump includes a flange 1, a pump body 2, a first condensing fin group 3 and a second condensing fin group 4, the flange 1 is arranged on the top of the pump body 2, and the flange 1 Welded with the pump body 2, the first condensing fin group 3 and the second condensing fin group 4 are arranged in the pump body 2, the first condensing fin group 3 is distributed horizontally, and the second condensing fin group The group 4 is vertically distributed, and a vacuum cover 5 is installed on the outside of the second condensing fin group 4, and the vacuum cover 5 is fixedly connected with the pump body 2, and the bottom of the pump body 2 is provided with a refrigerator 6, and the first A second-stage cold head 7 is installed in the middle of the condensing fin group 3, and a first-stage cold head 8 is installed below the vacuum cover 5. The second-stage cold head 7, the first-stage cold head 8, and the refrigerator 6 are sequentia...

Embodiment 3

[0034] refer to figure 1 As shown, a cryogenic vacuum pump includes a flange 1, a pump body 2, a first condensing fin group 3 and a second condensing fin group 4, the flange 1 is arranged on the top of the pump body 2, and the flange 1 Welded with the pump body 2, the first condensing fin group 3 and the second condensing fin group 4 are arranged in the pump body 2, the first condensing fin group 3 is distributed horizontally, and the second condensing fin group The group 4 is vertically distributed, and a vacuum cover 5 is installed on the outside of the second condensing fin group 4, and the vacuum cover 5 is fixedly connected with the pump body 2, and the bottom of the pump body 2 is provided with a refrigerator 6, and the first A second-stage cold head 7 is installed in the middle of the condensing fin group 3, and a first-stage cold head 8 is installed below the vacuum cover 5. The second-stage cold head 7, the first-stage cold head 8, and the refrigerator 6 are sequentia...

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Abstract

The invention discloses a low-temperature vacuum pump. The low-temperature vacuum pump comprises a flange, a pump body, a first condensation fin set and a second condensation fin set, wherein the flange is arranged at the top end of the pump body and is welded to the pump body, the first condensation fin set and the second condensation fin set are arranged in the pump body, the first condensation fin set is distributed horizontally, and the second condensation fin set is distributed vertically; a vacuum cover is installed outside the second condensation fin set and is fixedly connected to the pump body; a refrigerating machine is arranged on the bottom of the pump body, a second-stage cooling head is installed in the middle of the first condensation fin set, a first-stage cooling head is installed below the vacuum cover, the second-stage cooling head, the first-stage cooling head and the refrigerating machine sequentially communicate with one another in a sealed mode, and a pressure release valve and a refrigerating machine driver are installed on one side of the refrigerating machine. By the low-temperature vacuum pump,clean and oil-less high vacuum and ultrahigh vacuumcan be obtained and maintained, and the low-temperature vacuum pumpis compact in structure, convenient and reliable to install and convenient to maintain.

Description

technical field [0001] The invention relates to the technical field of a pump body, in particular to a low-temperature vacuum pump. Background technique [0002] Cryogenic vacuum pump refers to a vacuum pump that utilizes the low temperature surface below 20K to condense and adsorb gas. With the development of modern science and technology and industries such as microelectronics technology, semiconductor industry and space simulation technology, the requirements for a clean and pollution-free working environment are becoming more and more urgent. Electronic industry and vacuum coating industry, especially semiconductor microelectronics technology, semiconductor and integrated circuit technology require an oil-free vacuum environment. [0003] The traditional "oil pump" vacuum system cannot meet the requirements no matter in terms of cleanliness or ultimate vacuum. The study pointed out that among the currently available methods for obtaining high vacuum, the theoretical va...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B37/08F04B37/14F04B39/06F04B39/10F04B39/12C08L75/04C08L83/04C08K13/04C08K7/06C08K7/12C08K3/34C08K5/098C08K5/20C08K5/12
CPCC08L75/04F04B37/08F04B37/14F04B39/06F04B39/10F04B39/12C08L83/04C08K13/04C08K7/06C08K7/12C08K3/34C08K5/098C08K5/20C08K5/12
Inventor 张天松胡仁农
Owner WUHU HUANQIU AUTO PARTS
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