Robot grinding and polishing system based on CMP

A robot, six-axis robot technology, applied in surface polishing machine tools, grinding/polishing equipment, grinders, etc., can solve problems such as inability to obtain surface microstructure, low residual stress, and no change in limitations, and achieve good consistency , The effect of good processing consistency and shortening of working hours

Active Publication Date: 2016-06-15
WUHAN UNIV
View PDF9 Cites 17 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] These studies focus on fine control of grinding operations, real-time dynamic measurement for error compensation, and have not changed the limitations of traditional grinding wheel grinding in ultra-precision machining, neither can obtain a surface with good surface microstructure and low residual stress.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Robot grinding and polishing system based on CMP
  • Robot grinding and polishing system based on CMP
  • Robot grinding and polishing system based on CMP

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0031] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described below in combination with specific embodiments and with reference to the accompanying drawings.

[0032] Technical solution one embodiment

[0033] figure 1 It is a schematic diagram of the structural design scheme 1 of the CMP-based robot grinding and polishing system of the present invention. Such as figure 1 As shown, the system consists of a grinding wheel 7 with a polishing pad 6, a polishing liquid injection device 5, and a workpiece holder 3 for installing workpieces to form the grinding and polishing principle of CMP; the grinding wheel 7 rotates at a high speed driven by the electric spindle 2, and the six-axis robot 1 The workpiece clamp 3 is driven to move, and the free-form surface of the workpiece surface on the workpiece clamp 3 is ground and polished. The main point of CMP grinding and polishing is the polishing...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a robot grinding and polishing system based on CMP. The robot grinding and polishing system comprises a six-axis robot, a workpiece clamp used for placing workpieces, a contour detection unit used for detecting the workpieces needing to be polished and conducting three-dimensional reconstruction, a grinding wheel with a polishing pad, a base provided with the grinding wheel and a master controller. The free end of the six-axis robot is provided with an electric spindle provided with servo motors. A polishing liquid jetting device capable of jetting CMP polishing liquid to the workpieces is arranged above the workpiece clamp. The workpiece clamp is installed on the electric spindle. The master controller controls the contour detection unit, the six-axis robot, the electric spindle and all the servo motors. The workpiece clamp and the grinding wheel with the polishing pad can also be exchanged in position so as to adapt to polishing of different sizes of workpieces. The robot grinding and polishing system is high in efficiency and good in machining consistency, harmful effects such as mechanical damage and burns which may be caused by common grinding cannot be caused on the workpieces, damage to surfaces or sub surfaces cannot occur, and perfect surfaces can be machined.

Description

technical field [0001] The invention relates to a workpiece grinding and polishing system, in particular to a robot grinding and polishing system based on CMP (Chemical Mechanical Polishing), which is used for ultra-precision polishing of complex curved surface parts such as aeroengine blades and steam turbine blades. It can ensure good surface quality after grinding and low residual stress on the surface. Background technique [0002] Grinding of the workpiece is a key process. It can eliminate the tool marks left by the workpiece turning and milling, eliminate the surface defects of the workpiece, and obtain a workpiece surface with higher surface quality and less residual stress, and these are important for improving the life of the workpiece. , especially for parts that are prone to fatigue failure such as aero-engine blades, it has a great improvement effect. [0003] The surfaces of aero-engine blades and steam turbine blades are free-form surfaces, which are diffic...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): B24B19/14B24B57/02B24B29/02
CPCB24B19/14B24B29/02B24B57/02
Inventor 刘胜王春喜桂成群郑怀
Owner WUHAN UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap