Robot grinding and polishing system based on CMP

Abstract

The invention discloses a robot grinding and polishing system based on CMP. The robot grinding and polishing system comprises a six-axis robot, a workpiece clamp used for placing workpieces, a contour detection unit used for detecting the workpieces needing to be polished and conducting three-dimensional reconstruction, a grinding wheel with a polishing pad, a base provided with the grinding wheel and a master controller. The free end of the six-axis robot is provided with an electric spindle provided with servo motors. A polishing liquid jetting device capable of jetting CMP polishing liquid to the workpieces is arranged above the workpiece clamp. The workpiece clamp is installed on the electric spindle. The master controller controls the contour detection unit, the six-axis robot, the electric spindle and all the servo motors. The workpiece clamp and the grinding wheel with the polishing pad can also be exchanged in position so as to adapt to polishing of different sizes of workpieces. The robot grinding and polishing system is high in efficiency and good in machining consistency, harmful effects such as mechanical damage and burns which may be caused by common grinding cannot be caused on the workpieces, damage to surfaces or sub surfaces cannot occur, and perfect surfaces can be machined.

Description

technical field [0001] The invention relates to a workpiece grinding and polishing system, in particular to a robot grinding and polishing system based on CMP (Chemical Mechanical Polishing), which is used for ultra-precision polishing of complex curved surface parts such as aeroengine blades and steam turbine blades. It can ensure good surface quality after grinding and low residual stress on the surface. Background technique [0002] Grinding of the workpiece is a key process. It can eliminate the tool marks left by the workpiece turning and milling, eliminate the surface defects of the workpiece, and obtain a workpiece surface with higher surface quality and less residual stress, and these are important for improving the life of the workpiece. , especially for parts that are prone to fatigue failure such as aero-engine blades, it has a great improvement effect. [0003] The surfaces of aero-engine blades and steam turbine blades are free-form surfaces, which are diffic...

AI Technical Summary

Problems solved by technology

[0006] These studies focus on fine control of grinding operations, real-time dynamic measurement for error compensation, and have not changed the limitations of traditional grinding wheel grinding in ultra-precision machining, neither can obtain a surface with good surface microstructure and low residual stress.

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