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Tungsten-rhenium film thermocouple sensor containing high temperature protection film group and preparation method

A thermocouple sensor, high temperature protection technology, applied in thermometer parts, instruments, thermometers and other directions, can solve problems such as thermal mismatch, failure, oxidation, etc., to strengthen anti-oxidation, strengthen the effect, and solve the problem of material evaporation and shedding. Effect

Active Publication Date: 2016-06-15
XI AN JIAOTONG UNIV
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Problems solved by technology

[0003] The purpose of the present invention is to solve the problems of thermal mismatch, oxidation, and basic failure near 1400K in the prior art, and propose a tungsten-rhenium thin-film thermocouple sensor containing a high-temperature protection thin-film group and its preparation method, so that it has long-lasting While measuring the temperature at a high temperature of 1000K ~ 1700K, it also has the characteristics of miniaturization

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  • Tungsten-rhenium film thermocouple sensor containing high temperature protection film group and preparation method

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[0027] The present invention is described in further detail below in conjunction with accompanying drawing:

[0028] see figure 1 and figure 2 , the tungsten-rhenium thin-film thermocouple sensor containing the high-temperature protective thin-film group of the present invention includes a silicon carbide substrate 1, the front of the silicon carbide substrate 1 is connected to a parallel tungsten-rhenium alloy thin-film group 2, and the parallel-connected tungsten-rhenium alloy thin-film group 2 consists of multiple groups Tungsten-rhenium galvanic couple thin film positive electrode and tungsten-rhenium galvanic couple thin-film negative electrode, two metal films with different compositions, form the whole thin-film galvanic couple. The tungsten-rhenium alloy positive electrode film and the tungsten-rhenium alloy negative electrode film in the parallel tungsten-rhenium alloy film group 2 are connected to each other, and the thickness is guaranteed to be consistent. The p...

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Abstract

The invention discloses a tungsten-rhenium film thermocouple sensor containing a high temperature protection film group and a preparation method. The high temperature protection film group and parallel tungsten-rhenium film thermocouple jointly form a sensor chip. A tungsten-rhenium film group, a high-temperature electrode and an aluminium oxide film protective layer are connected on a silicon carbide-based substrate, and cover an amorphous silicon carbide film protective layer. The tungsten-rhenium film thermocouple sensor can measure temperature signals for a long time under high temperature (1000 to 1700K), has the characteristics of high temperature resistance, oxidation prevention and high Seebeck coefficient, and solves the problems in existing technologies, such as the problems of thermal mismatch and oxidation under high temperature and failure around 1400K.

Description

【Technical field】 [0001] The invention belongs to the technical field of micro temperature sensor chips, and in particular relates to a tungsten-rhenium thin-film thermocouple sensor containing a high-temperature protection thin-film group and a preparation method thereof. 【Background technique】 [0002] Thermocouple temperature sensor, since it was first invented in the 1920s, has been widely used in the field of temperature measurement. As a kind of standard test and measurement equipment, it has the advantages of simple and convenient manufacture and use, high precision and small inertia in measurement and test. Among them, the high-temperature thermocouple temperature sensor is of great value in measuring the temperature under harsh working conditions. However, for contact-type high-temperature direct measurement that requires miniaturization, current technical means are insufficient. A new thin-film thermocouple structure using magnetron sputtering technology is a new ...

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Application Information

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IPC IPC(8): G01K7/02G01K1/12
CPCG01K1/12G01K7/028G01K7/02G01K7/06
Inventor 田边张仲恺郑晨史鹏蒋庄德
Owner XI AN JIAOTONG UNIV
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