Optimal buffer space configuration and scheduling for single-arm multi-cluster tools

A technology of combining equipment and buffer space, applied in design optimization/simulation, manufacturing tools, general control systems, etc., can solve problems such as payment

Inactive Publication Date: 2016-06-15
MACAU UNIV OF SCI & TECH
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  • Abstract
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  • Claims
  • Application Information

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  • Optimal buffer space configuration and scheduling for single-arm multi-cluster tools
  • Optimal buffer space configuration and scheduling for single-arm multi-cluster tools
  • Optimal buffer space configuration and scheduling for single-arm multi-cluster tools

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example 1

[0155] Example 1: According to the scheduling problem of 3-combination devices proposed in the literature [Chan et al., 2011b]. The activity time of each device is as follows: For C 1 In terms of α 10 = 0 (vacuum lock), α 11 =34s, α 12 =0(BM 1 ), α 13 =31s, α 14 =4s, λ 1 = 10s and μ 1 = 1s; for C 2 In terms of α 20 =0(BM 1 ), α 21 =82s, α 22 =0(BM 2 ), α 23 =54s, α 24 =12s, λ 2 =7s and μ 2 = 1s; and for C 3 In terms of α 30 =0(BM 2 ), α 31 =54s, α 32 =38s, α 33 =91s, α 34 =90s, λ 3 = 3s and μ 3 = 1s. According to the single-space BM scheduling problem solved in the literature [Chan et al., 2011b], a multi-product cycle scheduling with a cycle time of 114.8s is obtained. The solutions covered in this article are as follows:

[0156] for C 1 In terms of such that ζ 10 = α 10 +4λ 1 +3μ 1 =0+4×10+3×1=43s, ζ 11 = α 11 +4λ 1 +3μ 1 =34+4×10+3×1=77s, ζ 12 =43s, ζ 13 =74s, ζ 14 =47s and ψ 11 =2(n[1]+1)(μ 1 +λ 1 )=2×(4+1)×(10+1)=110s. Therefor...

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Abstract

The invention provides a method for scheduling single-arm multi-cluster tools. The present invention studies the scheduling problem of a single-arm multi-cluster tool with a linear topology and process-bound bottleneck individual tool. Its objective is to find a one-wafer cyclic schedule such that the lower bound of cycle time is reached by optimally configuring spaces in buffering modules that link individual cluster tools. A Petri net model is developed to describe the dynamic behavior of the system by extending resource-oriented Petri nets such that a schedule can be parameterized by robots' waiting time. Based on this model, conditions are presented under which a one-wafer cyclic schedule with lower bound of cycle time can be found. With the derived conditions, an algorithm is presented to find such a schedule and optimally configure the buffer spaces.

Description

[0001] priority [0002] This application claims priority under 35 U.S.C. §119 to U.S. Provisional Patent Application No. 62 / 102,108, filed January 12, 2015, the disclosure of which is hereby incorporated by reference in its entirety. technical field [0003] The invention relates to a method of constructing and scheduling single-arm multi-combination equipment with optimal buffer space. Background technique [0004] The following references are cited in the specification. The disclosures of these references are hereby incorporated by reference in their entirety. [0005] Reference list [0006] W.K.Chan, J.G.Yi, and S.W.Ding, "Optimal Scheduling of Multi-cluster Tools with Constant Robot Moving Times, Part I: Two-Cluster Analysis", IEEE Transactions on Automation Science and Engineering, 2011a, No. pp.5-16, Vol. 8. [0007] W.K.Chan, J.G.Yi, S.W.Ding, and D.Z.Song, "Optimal Scheduling of Multi-cluster Tools with Constant Robot Moving Times, Part II: Tree-LikeTopology Con...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418
CPCG05B19/41865H01L21/67184H01L21/67276Y10S901/02Y10S901/41G06F30/22B25J9/009G05B2219/45032
Inventor 白丽平伍乃骐李志武周孟初
Owner MACAU UNIV OF SCI & TECH
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