How to make a mems electrostatic driver

Abstract

A method for manufacturing a MEMS electrostatic driver. The structure of an upper electrode plate (second electrode plate) and a lower electrode plate (first electrode plate) is fabricated through a bonding and etching process, avoiding the need for traditional methods. The process of depositing the film and removing the sacrificial layer reduces the residual stress of the device film (upper electrode plate), avoids the deformation of the flattened device, and improves the performance of the device.

Description

technical field [0001] The invention relates to the technical field of semiconductor devices, in particular to a method for manufacturing an MEMS electrostatic driver. Background technique [0002] MEMS micro-driver (actuator), also known as actuator or actuator, is a device that converts energy into controllable motion and power output under the action of a control signal. Microactuator is an important MEMS device, which has a wide range of applications in the fields of optics, communication, biomedicine, and microfluidics. The core of a microactuator consists of a transducer that converts electrical energy into mechanical energy, and a microstructure that performs the energy output. According to the source of energy, actuators can be divided into electric, magnetic, thermal, optical, mechanical, acoustic, and chemical and biological actuators. Commonly used driving methods include electrostatic, electromagnetic, electric heating, piezoelectric, memory alloy, electrostrict...

AI Technical Summary

Problems solved by technology

However, in surface micromachining, depositing a thin film and removing the sacrificial layer will cause residual stress in the film, which will deform the device that has been processed flat, thus affecting the performance of the device.

Images