Mask plate assembly for high-precision evaporation

A mask, high-precision technology, used in vacuum evaporation coating, electrical components, sputtering coating and other directions, can solve the problems of uneven physical force, difficult to control precision, deformation difference and other problems

Inactive Publication Date: 2016-08-03
KUN SHAN POWER STENCIL
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  • Abstract
  • Description
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Problems solved by technology

[0006] However, there is still an unavoidable technical problem in the above prior art, because the evaporation region 211 and the non-evaporation region 212 on the mask unit 21 have completely different structures (such as Figure 5 As shown, the vapor deposition area 211 is a through-hole array structure, and the non-evaporation area 212 is a non-through-hole array structure), and the mask unit 21 is stretched by an external mechanism (stretching will cause a certain deformation of the board surface), The physical stress of each area on the surface is not uniform, so the deformation of each area has a certain difference, which makes it difficult to control the position accuracy of the through holes for depositing organic materials on the evaporation area 211 on the mask unit

Method used

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  • Mask plate assembly for high-precision evaporation
  • Mask plate assembly for high-precision evaporation
  • Mask plate assembly for high-precision evaporation

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Embodiment Construction

[0043] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0044] In describing the present invention, it should be understood that the terms "upper", "lower", "bottom", "top", "front", "rear", "inner", "outer", "horizontal", " The orientation or positional relationship indicated by "vertical", etc. is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, so as to Spe...

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Abstract

The invention provides a mask plate assembly for high-precision evaporation. The mask plate assembly comprises a mask frame and at least one set of mask units arranged on the mask frame. Each mask unit is formed by two layers of structures including a mask appearance layer and a mask opening layer; and through the reasonable arrangement of the structure of the two layers of structures including the mask appearance layers and the mask opening layers, the mask plate assembly can have the higher position precision, deposition of follow-up OLED substrate surface organic materials can be well achieved, and the quality of OLED products is effectively improved.

Description

technical field [0001] The invention belongs to the manufacturing industry of display panels, and in particular relates to a mask plate component for evaporation used in the manufacturing process of OLED display panels. Background technique [0002] Because organic light-emitting diodes (Organic Light-Emitting Diode, OLED) have self-illumination at the same time, do not need backlight, high contrast, thin thickness, wide viewing angle, fast response speed, can be used for flexible panels, wide temperature range, structure and The excellent characteristics such as relatively simple manufacturing process are considered to be the emerging application technology of the next generation of flat panel displays. [0003] The most important part in the OLED production process is to evaporate the organic layer onto the substrate according to the requirements of the drive matrix to form a key light-emitting display unit. OLED luminescent material is a solid material, and the developme...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24H01L51/56
CPCC23C14/042C23C14/24H10K71/166
Inventor 魏志凌王武怀潘世珎
Owner KUN SHAN POWER STENCIL
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