dna sequencing device and manufacturing method

Abstract

The invention provides a DNA sequencing device and a manufacturing method. The device mainly comprises a silicon dioxide thin film arranged on a double-side polished monocrystalline silicon piece. A silicon nitride thin film grows on the top of the silicon dioxide thin film. A bottom layer contact electrode is prepared on the silicon nitride thin film and covered with a bottom layer graphene micro-strip. The bottom layer graphene micro-strip is covered with a hexagonal boron nitride micro-strip. The hexagonal boron nitride micro-strip is covered with a top layer graphene micro-strip. A graphene-hexagonal boron nitride-graphene heterostructure is formed by the bottom layer graphene micro-strip, the hexagonal boron nitride micro-strip and the top layer graphene micro-strip. Graphene-hexagonal boron nitride-graphene nano-pores are etched. According to the device, the problem that a conventional solid-state nano-pore channel is too long, so that the sequencing resolution ratio does not reach single base is solved, and the problem that a tunneling electrode is difficult to manufacture in a tunneling current DNA sequencing method is solved. The advantages lay a foundation for achieving single base resolution ratio and direct nano-pore sequencing.

Description

technical field [0001] The invention relates to the technical field of DNA sequencing, in particular to a DNA sequencing device and a manufacturing method. Background technique [0002] Deoxyribonucleic acid (DNA) sequencing technology is one of the core technologies of modern life science research. From the first-generation sequencing technology based on the fluorescent-labeled Sanger method to the second-generation sequencing technology represented by the cycle array sequencing-by-synthesis method, it has greatly changed the way people study the blueprint of all life, and promoted the creation of genomics and related disciplines and development. [0003] However, after decades of development, first-generation sequencing technologies have reached their limits in terms of speed and cost due to their reliance on electrophoretic separation techniques. Because the second-generation sequencing technology relies on fluorescent or chemiluminescent substances, it is difficult to ...

AI Technical Summary

Problems solved by technology

Since the above two types of methods have different requirements on the structure of nanopores, they are often used separately, which limits the accuracy and reliability of nanopore DNA sequencing.

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