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Displacement measurement correction device and method

A technology of displacement measurement and correction device, which is applied in the field of measurement to achieve high precision, reduce influence and ensure high precision.

Inactive Publication Date: 2016-08-17
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The embodiments of the present invention provide a displacement measurement and correction device and method to solve the problem in the prior art that the displacement sensor requires higher manufacturing and installation accuracy standards when the displacement sensor meets the requirements of high-resolution and high-precision displacement measurement. Effectively reduce the manufacturing and use costs of displacement sensors

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  • Displacement measurement correction device and method

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Embodiment 1

[0034] like figure 1 As mentioned above, the embodiment of the present invention provides a displacement measurement correction device, which is used to realize intelligent correction of displacement measurement and improve the precision of displacement measurement. Wherein, the device includes:

[0035] Grating displacement sensor 1, described grating displacement sensor 1 is used for carrying out displacement measurement;

[0036] Specifically, the grating displacement sensor 1 further includes: a scale grating 11 and a sensor reading head 12 , and the sensor reading head 12 is used to obtain displacement measurement information of a relative movement with the scale grating 11 .

[0037] An electronic control unit 2, the electronic control unit 2 is used to obtain the first displacement information measured by the grating displacement sensor 1;

[0038] Specifically, on the one hand, the electronic control unit 2 is used to obtain the first displacement information measure...

Embodiment 2

[0050] like figure 2 As shown, the embodiment of the present invention also provides a displacement measurement correction method, the method comprising:

[0051] Step 110: Obtain the first displacement information of the grating displacement sensor;

[0052] Step 120: Obtain error compensation information according to the first displacement information;

[0053] Step 130: Correct the displacement measurement according to the error compensation information and the second displacement information.

[0054] It should be noted that the core of this solution is to obtain error compensation information according to the first displacement information, and then use the error compensation information to compensate the second displacement information to complete the correction of the displacement measurement, so as to achieve the purpose of the embodiment of the present invention. Among them, the first displacement information can be regarded as the basic data, and the correction pa...

Embodiment 3

[0057] For a displacement measurement and correction device and method provided in the embodiments of the present invention, there are mainly the following three error sources in a specific usage scenario:

[0058] 1. Measurement system motion trajectory error;

[0059] 2. Measurement system periodic error;

[0060] 3. Measurement system drift error.

[0061] In order to better achieve the technical effect of ensuring high precision and high resolution while effectively reducing the cost of manufacturing and using the grating displacement sensor, the embodiment of the present invention also provides technical solutions for the above three errors, the specific content is as follows:

[0062] 1. Correction of motion trajectory error of measurement system

[0063] The correction of the movement track error of the measurement system is to correct the systematic installation error and deformation error of the scale grating relative to the grating displacement sensor reading head....

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Abstract

The invention discloses a displacement measurement correction device and method, and belongs to the technical field of measurement. The method comprises the steps that displacement measurement is conducted through a grating displacement sensor, first displacement information is transmitted to a correction unit through an electric control unit, the correction unit acquires error compensation information according to the first displacement information and transmits the error compensation information to a data processing unit to be processed, and then intelligent correction on second displacement information is achieved. Accordingly, the technical effects that the manufacturing and using cost of the grating displacement sensor is effectively reduced while the high precision and the high resolution ratio are guaranteed are achieved.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to a displacement measurement and correction device and method. Background technique [0002] With the development of technology, many industrial fields have higher and higher requirements for precision measurement and processing equipment. Nanoscale high-resolution and high-precision displacement measurement technology has become the forerunner and basis for modern industrial technology to continue to move forward. [0003] Displacement sensors are used more and more in the above-mentioned high-resolution and high-precision displacement measurement technologies. For the use of the displacement sensor, in theory, as long as the subdivision times of the subsequent circuit are more, a higher resolution can be obtained. However, in practical applications, the increase of the subdivision multiple will increase the error while improving the resolution. Specifically, taking the gra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 高金磊宗明成
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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