All-integrated air velocity transducer
A wind speed sensor, a complete set of technology, applied in the direction of instrumentation, fluid speed measurement, speed/acceleration/shock measurement, etc., can solve the problems of limited application range, achieve the effect of expanding application range, low preparation cost, and high measurement accuracy
Inactive Publication Date: 2016-08-17
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology
The huge size of the traditional wind speed detector also limits its application range
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[0027] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.
[0028] Such as image 3 Shown is a schematic structural diagram of the fully integrated wind speed sensor of this embodiment, which is composed of a substrate 1, ultrasonic receiving modules 2-X, 2-Y, and ultrasonic generating modules 3-X, 3-Y. 2-X, 2-Y, 3-X, and 3-Y are bonded on the Si substrate bonding layer of the substrate 1 through a gold-tin bonding process.
[0029] Such as Figure 4 As shown, Si substrate bonding layer 1-2 is composed of gold thin film layer 1-3 and chromium thin film layer 1-4, and is prepared by vacuum evaporation method; integrated circuit 1-5 is prepared by standard Si integrated circuit manufacturing process.
[0030] Such as Figure 5 As shown, the square hole 2-2 is prepared by semiconductor microfabrication technology, and its function is to reduce the influence of the receiving Si column on the vibration o...
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The invention belongs to the technical field of electronic materials and components and provides an all-integrated air velocity transducer. The all-integrated air velocity transducer is composed of a base plate, two identical ultrasonic generation modules and two identical ultrasonic receiving modules. The base plate is composed of a Si substrate, a Si substrate bonding layer and an integrated circuit. Each ultrasonic receiving module is composed of a Si column, a preparation hole, a square hole, an upper electrode, a lower electrode, a receiving piezoelectric body and a receiving bonding layer. Each ultrasonic generation module is composed of a Si column, a sound gathering hole, a sound production unit and a generation bonding layer. Each ultrasonic generation module and the corresponding receiving module form a set of receiving and transmitting system, and there are two sets in total. The ultrasonic generation modules and the ultrasonic receiving modules are mechanically connected with the base plate and electrically connected with the integrated circuit. The all-integrated air velocity transducer has the advantages that the size is small, the integration level is high, the transducer is completely compatible with an existing integrated circuit process, the measurement precision is high, and the preparation cost is low; the application range of the air velocity measurement technology is effectively expanded.
Description
technical field [0001] The invention belongs to the technical field of electronic materials and components, in particular to a fully integrated wind speed sensor. technical background [0002] Wind speed detection is widely used in almost all fields, such as: highway cross wind lake wind monitoring, mine air flow monitoring, weather monitoring, exhaust system and so on. The wind speed sensor is an important part of wind speed detection. [0003] Traditional wind speed detection equipment includes mechanical-based wind speed detectors and ultrasonic wind speed detectors. The traditional mechanical wind speed detector drives the windmill to rotate through the wind, uses the photoelectric sensor to detect the speed of the windmill, and then converts the speed of the windmill into wind speed through an algorithm, which does not directly detect the wind speed; its advantages lie in low cost and simple production process , but it is not sensitive to wind speed. When the wind for...
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IPC IPC(8): G01P5/24
CPCG01P5/24
Inventor 罗文博陈留根吴勤勤俞玉澄吴传贵帅垚张万里
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA