Miniature Fourier infrared spectrograph adopting MEMS translational micro-mirror and MEMS torsional micro-mirror

A technology of infrared spectrometer and translational micromirror, which is applied in the field of spectral measurement and spectroscopic instruments, and can solve the problem that the spectral resolution is difficult to reach time-modulated instruments, etc.

Active Publication Date: 2016-08-24
NANKAI UNIV +1
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[0006] Although it has the high sensitivity characteristics of interference spectroscopic inst

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  • Miniature Fourier infrared spectrograph adopting MEMS translational micro-mirror and MEMS torsional micro-mirror

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Embodiment Construction

[0018] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings.

[0019] Such as figure 1 The present invention shown uses the MEMS translational micromirror 4 to form a miniature double Michelson interferometer structure, uses the MEMS torsion micromirror to realize the detector conversion, and integrates other optical elements to form an ultra-small spectrometer.

[0020] Such as figure 1 As shown, the left side of the figure is the main interferometer part, which is responsible for signal light interferometry. On the right is the part of the auxiliary interferometer, which uses a semiconductor laser as a reference for standard interferometry. Both sides of the translational micromirror 4 are coated with an infrared reflective film, and the main and auxiliary two interferometers share a micromirror. Due to the use of MEMS translational micromirror 4, the instrument has a very high scanning speed, far ex...

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Abstract

The invention relates to a Fourier infrared spectrograph system integrating an MEMS translational micro-mirror and an MEMS torsional micro-mirror. The system includes two subsystems, namely, a main interferometer system and an auxiliary interferometer system; the main interferometer system and the auxiliary interferometer system share one translational micro-mirror; the torsional micro-mirror is of a torsion beam structure, is driven through an electrostatic or magnetic induction mode, and can achieve high-speed rotary swing with a frequency reaching tens of Hertz to several thousands of hertz, and a rotation angle reaching fifty degrees maximally; and the translational micro-mirror is of a spring vibration structure, can achieve translational movement with a translational movement frequency reaching more than 100 MHz and a translational movement range reaching more than 100 microns. These micro-mirrors have the characteristics such as being free of friction, high repetition, high stability and the like. Since the micro-mirrors are small in size, light in weight, and small in inertia and rotational inertia, the micro-mirrors have great shock resistance, so that the micro interferometers can be formed.

Description

technical field [0001] The invention is a micro-Fourier transform infrared spectrum measuring system adopting MEMS (Micro-Electro-Mechanical System) micromirrors, which can be applied to the fields of spectrum measurement, spectrum instruments and the like. technical background [0002] Due to its strong characteristics, infrared spectroscopy can provide rich information on material structure, and can perform non-destructive testing on some samples, and can test trace samples, so it is not only a powerful tool for material structure analysis, but also an effective tool for analysis and identification. method. Infrared spectroscopy is widely used in food science and food safety, environmental pollution detection, life science, agricultural science, petroleum geological exploration, material science and many other fields. Compared with the traditional spectroscopic infrared spectrometer, the Fourier infrared spectrometer has the advantages of fast measurement speed and high s...

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Application Information

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IPC IPC(8): G01J3/28
Inventor 徐晓轩李昊宇王斌叶坤涛郭振龙
Owner NANKAI UNIV
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