Recording layer for optical information recording medium, optical information recording medium, and sputtering target

A recording medium and recording layer technology, which is applied in the field of sputtering targets, can solve problems such as the increase in the number of optical disc layers, the decrease in productivity, and the increase in the number of film layers, and achieve the effect of excellent recording sensitivity

Active Publication Date: 2019-07-02
KOBE STEEL LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0019] However, it is difficult for the recording material disclosed as the prior art to satisfy these required characteristics by the recording material alone. In the phase change method, since the reflectance of the recording layer alone is low, it is necessary to improve the reflectance in the state of the optical disc. Set a reflective film, and in order to increase the degree of modulation, it is also necessary to set ZnS-SiO on the top and bottom of the recording layer 2 and other dielectric layers, thereby increasing the number of layers that make up an optical disc
In addition, in the above-mentioned interlayer reaction method, it is also necessary to provide a plurality of recording layers, so the number of layers constituting the optical disc increases.
Therefore, there is a problem that the increase in the number of film layers reduces the productivity

Method used

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  • Recording layer for optical information recording medium, optical information recording medium, and sputtering target
  • Recording layer for optical information recording medium, optical information recording medium, and sputtering target
  • Recording layer for optical information recording medium, optical information recording medium, and sputtering target

Examples

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Effect test

Embodiment 1

[0105] (1) Production of CD

[0106] As the disk substrate, a polycarbonate substrate (thickness: 1.1 mm, diameter: 120 mm, track pitch: 0.32 μm, groove depth: 25 nm) was used. On this substrate, the oxidation of X metal was formed by the DC magnetron sputtering method. Recording layers with different content of Pd oxide and Pd oxide (Pd monoxide and Pd dioxide respectively account for the total mole ratio of Pd monoxide and Pd dioxide, respectively, as shown in Table 1). The film thickness of the recording layer is 40 nm. Regarding sputtering, multiple sputtering under simultaneous discharge of multiple targets of pure X metal (Sn, Zn, Bi, In, Ge, Co, W, Cu) target and pure Pd metal target was performed. The sputtering conditions for forming the above-mentioned recording layer are Ar flow rate: 10 sccm or 15 sccm and oxygen flow rate: 15 sccm or 24 sccm. In addition, air pressure: 0.3 to 0.6 Pa, DC sputtering power: 100 to 200 W, and substrate temperature: room temperature.

[...

Embodiment 2

[0120] (1) Production of CD

[0121] As the disk substrate, a polycarbonate substrate (thickness: 1.1 mm, diameter: 120 mm, track pitch: 0.32 μm, groove depth: 25 nm) was used. In addition, for Nos. 4 to 10, by the DC magnetron sputtering method, an oxide target or a pure metal target was used to form a dielectric layer with the composition and film thickness shown in Table 2 (bottom). The sputtering conditions used to form the dielectric layer (bottom) are Ar flow rate: 10-30 sccm, oxygen flow rate (when a pure metal target is used as a target): 0-10 sccm, air pressure: 0.2 to 0.4 Pa, DC sputtering power: 100~400W, substrate temperature: room temperature.

[0122] Next, a recording layer was formed. In detail, recording layers were respectively formed on the substrate [on the dielectric layer (lower) for Nos. 4 to 10] by the DC magnetron sputtering method. The film thickness of the recording layer is 40 nm. Regarding sputtering, multi-element sputtering under simultaneous disc...

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Abstract

The present invention provides a recording layer for an optical information recording medium excellent in recording characteristics, an optical information recording medium including the recording layer, and a sputtering target useful for forming the recording layer. This recording layer for an optical information recording medium is a recording layer for recording by irradiation with laser light, and is characterized in that it contains a metal (hereinafter referred to as X metal) whose absolute value of the standard free energy of formation of an oxide relative to 1 mol of oxygen is larger than that of Pd. ) oxide and Pd oxide, the Pd oxide contains Pd monoxide and Pd dioxide, and the ratio of Pd atoms to the total of X metal atoms and Pd atoms contained in the recording layer is 4 to 85 atomic %.

Description

[0001] This application is a divisional application of application number: 201080040683.3 (PCT / JP2010 / 066099), application date: 2010.09.16, invention title: "recording layer for optical information recording medium, optical information recording medium and sputtering target". Technical field [0002] The present invention relates to a recording layer for an optical information recording medium, an optical information recording medium, and a sputtering target useful for the formation of the recording layer. Background technique [0003] Optical information recording media (optical discs) are represented by optical discs such as CDs, DVDs, and BDs. According to recording and reproduction methods, they are roughly classified into three types: reproduction-only type, write-once type, and overwrite type. Among them, the recording method of write-once optical discs is mainly divided into a phase change method that causes a phase change in the recording layer, an interlayer reaction meth...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G11B7/2433G11B7/2437C23C14/08C23C14/34G11B7/24038G11B7/243
CPCC23C14/08C23C14/3414G11B7/24038G11B7/2433G11B7/2437G11B2007/24304G11B2007/24306G11B2007/24308G11B2007/24312G11B2007/2432Y10T428/21B41M5/26G11B7/243G11B7/254
Inventor 田内裕基志田阳子三木刚曾根康宏
Owner KOBE STEEL LTD
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