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Method for preparing hafnium/silicon nitride conductive and corrosion-resistant multilayer structure coating on magnesium alloy

A multi-layer structure, magnesium alloy technology, applied in the direction of metal material coating process, coating, superimposed layer plating, etc., can solve problems such as coating failure, reduce the amount of hydrogen evolution of the sample, reduce the roughness, and improve the durability The effect of erosion ability

Inactive Publication Date: 2019-01-08
XIAMEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the Al / Ti composite multilayer coating can reduce the penetrating defects in the coating to a certain extent, the galvanic effect between the different components of Al and Ti in the coating itself causes the coating itself to fail and does not protect the substrate. Effect

Method used

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  • Method for preparing hafnium/silicon nitride conductive and corrosion-resistant multilayer structure coating on magnesium alloy
  • Method for preparing hafnium/silicon nitride conductive and corrosion-resistant multilayer structure coating on magnesium alloy
  • Method for preparing hafnium/silicon nitride conductive and corrosion-resistant multilayer structure coating on magnesium alloy

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] 1. Substrate pretreatment

[0034] (1) Mechanical grinding and polishing treatment. First, grind the magnesium alloy on 320-mesh SiC water-grinding paper until the surface is smooth, and place it in absolute ethanol for ultrasonic cleaning for 5 minutes; then grind it on 1500-mesh SiC water-grinding paper until the scratches are in the same direction. Ultrasonic cleaning in ethanol for 5 minutes; then grinding on 3000-mesh SiC water-grinding paper along the vertical direction of 1500-mesh sandpaper scratching for 120 seconds, ultrasonic cleaning in ethanol for 5 minutes; Direction Gently grind for 120s until there are no obvious scratches on the surface, then place it in ethanol for ultrasonic cleaning for 15min. Use a diamond polishing spray with a particle size of 2.5 μm to rough polish the grinding sample for 60 seconds until the surface is bright; then use a diamond polishing paste with a particle size of 1 μm and 0.5 μm to perform fine polishing on the polishing di...

Embodiment 2

[0047] 1. Substrate pretreatment

[0048] (1) Mechanical grinding and polishing treatment, same as embodiment 1.

[0049] (2) chemical etching, same as embodiment 1.

[0050] (3) The ion source bombardment cleaning treatment is the same as that in Embodiment 1.

[0051] 2. Metal Hf, pure Si 3 N 4 The pre-sputtering of the target is the same as in Example 1.

[0052] 3. Alternate sputtering deposition of monolayer crystalline Hf coating and amorphous Si 3 N 4 Coating, preparation of Hf / Si 3 N 4 Multi-layer structural coating.

[0053] (1) DC sputtering deposition of single-layer metal Hf coating. After confirming that the ambient temperature of the cavity is 200°C and the temperature of the magnesium alloy substrate is 350°C, perform the following operations: adjust the Ar flow rate to 70.0sccm, adjust the chamber pressure to 0.45Pa; turn the sample stage to face the Hf metal target, both The distance is 15.0cm; set the Hf target DC sputtering power to 250W, open the ta...

Embodiment 3

[0061] 1. Substrate pretreatment

[0062] (1) Mechanical grinding and polishing treatment, same as embodiment 1.

[0063] (2) chemical etching, same as embodiment 1.

[0064] (3) The ion source bombardment cleaning treatment is the same as that in Embodiment 1.

[0065] 2. Metal Hf, pure Si 3 N 4 The pre-sputtering of the target is the same as in Example 1.

[0066] 3. Alternate sputtering deposition of monolayer crystalline Hf coating and amorphous Si 3 N 4 Coating, preparation of Hf / Si 3 N 4 Multi-layer structural coating.

[0067] (1) DC sputtering deposition of single-layer metal Hf coating. After confirming that the ambient temperature of the cavity is 200°C and the temperature of the magnesium alloy substrate is 350°C, perform the following operations: adjust the Ar flow rate to 70.0sccm, adjust the chamber pressure to 0.45Pa; turn the sample stage to face the Hf metal target, both The distance is 15.0cm; set the Hf target DC sputtering power to 200W, open the ...

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Abstract

The invention provides a method for preparing a conductive and corrosion-resistant multilayer-structured Hf / Si3N4 coating on an Mg alloy and relates to surface treatment of Mg alloys. The method comprises the following steps: 1) an Mg alloy matrix is pretreated; and 2) single-layer crystalline Hf coatings and amorphous Si3N4 coatings are subjected to alternate sputtering deposition on the Mg alloy matrix pretreated in the step 1), thereby completing preparation of the conductive and corrosion-resistant multilayer-structured Hf / Si3N4 coating on the Mg alloy. According to the method, good ion barrier property of amorphous Si3N4 is introduced to the metal HF coatings, respective performance advantages of Hf and Si3N4 are exerted, and the multilayer-structured coating having the advantages of controllable structure and components, good conductivity and corrosion resistance and taking metal Hf as a main and amorphous ceramic Si3N4 as an auxiliary is prepared on the surface of an Mg alloy sample with a magnetron sputtering technology.

Description

technical field [0001] The invention relates to magnesium alloy surface treatment, in particular to a method for preparing hafnium / silicon nitride conductive and corrosion-resistant multilayer structure coating on magnesium alloy. Background technique [0002] Magnesium alloys have many advantages such as low density, high specific strength, good electrical and thermal conductivity, and electromagnetic shielding properties, which make them have a very wide range of potential applications in rail transit, electronic communications, medical equipment, aerospace and other fields [1]. However, the high electrochemical activity makes magnesium alloys extremely prone to corrosion, especially under harsh conditions such as salt spray, which largely limits the application and promotion of magnesium alloys in industry. In order to improve the corrosion resistance of magnesium alloys, the main focus of current research is to optimize the composition structure and surface protection of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/16C23C14/06C23C28/00
CPCC23C14/0652C23C14/165C23C14/3464C23C14/352C23C28/322C23C28/34
Inventor 王周成张东方魏斌斌吴正涛
Owner XIAMEN UNIV
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