Cold isostatic pressing forming method of wafer laser transparent ceramic biscuit with double surfaces thickened by fluorous rubber
A technology of cold isostatic pressing and laser transparency, which is applied in the direction of rubber layered products, chemical instruments and methods, lamination, etc., can solve the problems of deformation of thin laser transparent ceramic green bodies, and improve the ability to resist warping and deformation, The effect of maintaining flatness and uniform pressure
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Embodiment 1
[0020] Step 1: According to the size of the thin laser transparent ceramic green body Φ50×3mm, cut the fluororubber with a thickness of 4mm into two fluororubber discs with a diameter of Φ50;
[0021] Step 2: Wrap the two Φ50×4mm fluororubber discs cut in step 1 on both sides of the Φ50×3mm thin laser transparent ceramic green body to form a Φ50×11mm fluororubber / ceramic green body / fluororubber sandwich configuration, and then put the whole into a plastic bag, and vacuumize the plastic bag;
[0022] Step 3: Put the thin-sheet laser transparent ceramic green body plastic-sealed in step 2 and thickened on both sides with fluororubber into a cold isostatic press, and press at 200 MPa for 5 minutes. Then release the pressure and take it out, cut open the plastic bag, break off the fluororubber on both sides, that is, press to obtain a high-density thin-sheet laser transparent ceramic green body without warping deformation.
Embodiment 2
[0024] Step 1: According to the size of the thin laser transparent ceramic green body Φ100×3mm, cut the fluororubber with a thickness of 4mm into two fluororubber discs with a diameter of Φ100;
[0025] Step 2: Wrap the two Φ100×4mm fluororubber discs cut in step 1 on both sides of the Φ100×3mm thin laser transparent ceramic green body to form a Φ100×11mm fluororubber / ceramic green body / fluororubber sandwich configuration, and then put the whole into a plastic bag, and vacuumize the plastic bag;
[0026] Step 3: Put the thin-sheet laser transparent ceramic green body plastic-sealed in step 2 and double-sided thickened with fluororubber into a cold isostatic press, press at 200MPa for 5 minutes, then release the pressure and take it out, cut the plastic bag, Split the fluorine rubber on both sides to obtain a high-density thin laser transparent ceramic green body without warping.
Embodiment 3
[0028] Step 1: According to the size of the thin laser transparent ceramic green body Φ100×3mm, cut the fluororubber with a thickness of 4mm into two fluororubber discs with a diameter of Φ100;
[0029] Step 2: Wrap the two Φ100×4mm fluororubber discs cut in step 1 on both sides of the Φ100×3mm thin laser transparent ceramic green body to form a Φ100×11mm fluororubber / ceramic green body / fluororubber sandwich configuration, and then put the whole into a plastic bag, and vacuumize the plastic bag;
[0030] Step 3: Put the thin-sheet laser transparent ceramic green body plastic-sealed in step 2 and thickened on both sides with fluororubber into a cold isostatic press, and press at 250MPa for 5 minutes. Then release the pressure and take it out, cut open the plastic bag, break off the fluororubber on both sides, that is, press to obtain a high-density thin-sheet laser transparent ceramic green body without warping deformation.
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