Femtosecond laser length-measuring device and method based on frequency conversion interference principle
A femtosecond laser and length measuring device technology, which is applied to measuring devices, optical devices, instruments, etc., can solve problems such as unfavorable automation implementation, and achieve the effect of long measuring distance and simple method.
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Embodiment 1
[0041] Such as figure 1 As shown, a femtosecond laser length measurement method and device based on the frequency conversion interference principle, including a femtosecond laser frequency comb (1) whose repetition rate can be controlled, a polarizer (2), a refracting mirror (3), a polarizing beam splitter ( 4), a precision displacement platform (5), a reference mirror (6), a measuring objective lens (7), a photoelectric detector (8), a data acquisition system (9), and a computer (10).
[0042] A femtosecond laser frequency comb (1) is used to generate a repetition rate f req The femtosecond laser, the polarizer (2) is used to adjust the laser polarization direction, the refracting mirror (3) is used to measure the light on the reflection side; the polarization beam splitter (4) divides the femtosecond laser into two, and respectively goes to the reference arm and the measuring arm, the precision displacement platform (5) is used to fine-tune the length of the arm of the refe...
Embodiment 2
[0061] Embodiment 2: Femtosecond laser interferometric distance measurement with fixed reference arm length and only frequency fine-tuning.
[0062] A femtosecond laser length measurement method and device based on the principle of frequency conversion interference, such as figure 2 As shown, it includes a femtosecond laser frequency comb (1) whose repetition rate can be controlled, a polarizer (2), a refracting mirror (3), a polarizing beam splitter (4), a reference mirror (6), a measuring objective lens (7), Photoelectric detector (8), data acquisition system (9), computer (10). The specific process is as follows:
[0063] Set the reference arm length of the measurement device to a fixed constant value L c .
[0064] The coherent overlapping phenomenon is obtained by adjusting the repetition frequency of the femtosecond laser frequency comb 1, assuming that the repetition frequency at this time is f rep = f 1 = 300MHz its "interference pitch" l p1 =c / f 1 =c / 300000000...
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