Molybdenum-containing composite nitride antifriction coating and preparation method thereof

A technology of nitrides and coatings, which is applied to molybdenum-containing composite nitride antifriction coatings. In the field of preparation of the coatings, it can solve the problems that the coatings cannot adapt to high-speed dry cutting technology, etc., and achieve easy industrial production, low friction coefficient and specific wear. efficiency, to achieve the effect of industrialized production

Inactive Publication Date: 2016-12-28
XIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a molybdenum-containing composite nitride antifriction coating, which solves the problem that the existing coating cannot adapt to high-speed dry cutting technology

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] After the workpiece is cleaned and dried, put it into a vacuum chamber and vacuumize it to 5.0×10 -3 After Pa, argon gas is introduced, and the flow rate of argon gas is 22sccm; the negative bias voltage is -400V loaded on the workpiece, the pulse frequency is 250KHz, and the pulse width is 500ns, and the flow of chromium target, titanium target, aluminum target and molybdenum target is adjusted to 0.5A, ion bombardment cleaning for 25min; adjust the workpiece negative bias to -60V, pulse frequency to 250KHz, pulse width to 500ns, workpiece holder speed to 4r / min, adjust the current of chromium target, titanium target, aluminum target and molybdenum target respectively To 4.5A, 6A, 6A and 5A, nitrogen gas is introduced, the set value of OPM is 55%, and the coating deposition time is 120min.

[0033] The modulation period of the coating obtained in Example 1 is 8nm, the atomic percentage of the Mo element in the coating is 15.0%, the thickness of the coating is 4 μm, the...

Embodiment 2

[0035] After cleaning and drying the workpiece, put it into the vacuum chamber and vacuumize it to 4.5×10 -3 After Pa, argon gas is introduced, and the flow rate of argon gas is 20sccm; the negative bias voltage is -400V loaded on the workpiece, the pulse frequency is 200KHz, and the pulse width is 600ns, and the flow of chromium target, titanium target, aluminum target and molybdenum target is adjusted to 0.4A, ion bombardment cleaning for 20min; adjust the workpiece negative bias to -65V, pulse frequency to 200KHz, pulse width to 400ns, workpiece holder speed to 5r / min, adjust the current of chromium target, titanium target, aluminum target and molybdenum target respectively To 4.5A, 6A, 6A and 5A, nitrogen gas is introduced, the set value of OPM is 50%, and the coating deposition time is 100min.

[0036] The modulation period of the coating obtained in Example 2 is 7.2nm, the atomic percentage of the Mo element in the coating is 15.0%, the thickness of the coating is 3.2 μm...

Embodiment 3

[0038] After cleaning and drying the workpiece, put it into a vacuum chamber and vacuumize it to 3.8×10 -3 After Pa, argon gas is introduced, and the flow rate of argon gas is 20sccm; the negative bias voltage is -350V loaded on the workpiece, the pulse frequency is 250KHz, and the pulse width is 800ns, and the flow of chromium target, titanium target, aluminum target and molybdenum target is adjusted to 0.3A, ion bombardment cleaning for 20min; adjust the workpiece negative bias to -60V, pulse frequency to 250KHz, pulse width to 450ns, workpiece holder speed to 6r / min, adjust the current of chromium target, titanium target, aluminum target and molybdenum target respectively To 3.5A, 5A, 5A and 4A, the set value of OPM is 45%, and the coating deposition time is 120min.

[0039]The modulation period of the coating obtained in Example 3 is 4.8nm, the atomic percentage of the Mo element in the coating is 13.9%, the thickness of the coating is 3.3 μm, the hardness is 3100HV, the f...

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PUM

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Abstract

The invention discloses a molybdenum-containing composite nitride antifriction coating. The molybdenum-containing composite nitride antifriction coating is a CrTiAlN/MoN coating with a layered periodic structure and has a modulation period of 3-8nm. The invention also discloses a preparation method of the molybdenum-containing composite nitride antifriction coating. The preparation method comprises cleaning and drying a workpiece, putting the workpiece into a vacuum chamber, carrying out vacuum-pumping, feeding argon into the vacuum chamber, carrying out ion bombardment cleaning, feeding nitrogen into the vacuum chamber, carrying out coating deposition and taking out the workpiece after a temperature in the vacuum chamber is reduced to the room temperature. The molybdenum-containing composite nitride antifriction coating has a layered periodic structure and the layered periodic structure guarantees high hardness and high bonding strength of the coating, is conducive to lubrication phase molybdena formation in friction wear and realizes coating lubrication and friction reduction. Compared with the traditional nitride coating, the molybdenum-containing composite nitride antifriction coating has a lower friction coefficient and a lower specific wear rate in a temperature range of the room temperature to 700 DEG C and can satisfy high speed dry cutting technology requirements on cutter coating wear resistance and thermal properties.

Description

technical field [0001] The invention belongs to the technical field of material surface engineering, and in particular relates to a molybdenum-containing composite nitride antifriction coating, and also relates to a preparation method of the coating. Background technique [0002] Transition metal nitride hard coatings have been applied to the surface treatment of knives because of their high hardness and good wear resistance. Among them, the most widely used CrAlN, TiAlN, CrTiAlN and other coated tools have a service life of 2 to 5 times longer than that of uncoated tools. In recent years, high-speed dry cutting technology has become the mainstream development trend of mechanical processing because it does not use cutting fluid to avoid environmental pollution and has high production efficiency. Under the condition of high-speed dry cutting, the high friction coefficient of CrAlN, TiAlN, CrTiAlN and other coatings aggravates the oxidation wear of the coating, which leads to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35
CPCC23C14/0036C23C14/0641C23C14/345C23C14/352
Inventor 张国君王涛任帅
Owner XIAN UNIV OF TECH
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