Laminated sealing film forming method and forming apparatus

Abstract

The invention provides a laminated sealing film forming method and forming apparatus, which is capable of forming a laminated sealing film having a thin film thickness and having a high sealing performance while suppressing a decrease in productivity and adhesion of foreign matters. In the laminated sealing film forming method, a laminated sealing film (203) having a structure stacked by an inorganic film (201) and an organic film (202) is formed on an organic EL element (S) obtained by forming a plurality of organic EL layers (102) serving as a light emitting layer on a substrate (101), and a step of forming the inorganic film (201) using an atomic layer deposition method and a step of forming the organic film (202) using a vapor deposition polymerization method are alternately repeated in a processing vessel (11).

Description

technical field [0001] The present invention relates to a method and apparatus for forming a laminated sealing film for forming a laminated sealing film used in an organic EL element. Background technique [0002] An organic EL display device using an organic EL element is attracting attention as a next-generation display device because it has low power consumption, is self-luminous, and can obtain light emission of various hues from an organic light-emitting material. [0003] The organic EL element is formed in a state in which an organic EL layer as a light emitting layer, an electrode layer, and the like are stacked in a plurality of element forming regions provided in a matrix on a substrate. [0004] As an organic EL display device using such an organic EL element, a member that emits white light used as an organic EL layer and a color filter portion corresponding to red (R), green (G), and blue (B) are known. A component made of a combination of color filters. [00...

AI Technical Summary

Problems solved by technology

However, as in the method described in Patent Document 1, when manufacturing a laminated sealing film, it is a common technical means to form an inorganic film and an organic film with mutually different devices, and it is necessary to transport the substrate between devices every time the layers are repeated. time, the more the number of layers increases, the lower the productivity

In addition, during transportation, the probability of foreign matter such as particles adhering to the element increases, and the probability of occurrence of a defect that reduces sealing performance due to foreign matter increases.

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