Neutron beam injector ion source field reverse configuration plasma radio frequency driver

A neutral beam injector and plasma technology, applied in the direction of plasma, electrical components, etc., can solve the problems that are not conducive to plasma temperature rise and confinement, and achieve the effect that is conducive to temperature rise and confinement

Inactive Publication Date: 2017-01-04
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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Problems solved by technology

The confinement method of this uniform magnetic field makes the Faraday cage directly contact the high-temperature plasma, which is not conducive to the temperature rise and confinement of the plasma.

Method used

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  • Neutron beam injector ion source field reverse configuration plasma radio frequency driver

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Embodiment Construction

[0009] Such as figure 1 As shown, a neutral beam implanter ion source field reverse configuration plasma radio frequency driver includes a vacuum chamber 1, and two coils 2 are arranged in parallel outside the vacuum chamber 1 as radio frequency power supply antennas, Each coil 2 is composed of windings greater than or equal to 1.5 turns, and the distance between the two coils 2 is greater than the maximum distance between the windings in any coil 2. The two coils 2 pass through the same phase radio frequency current, and the magnetic field generated by the coil 2 In the same direction, a metal Faraday cage 3 is installed inside the vacuum chamber 1; when the two coils 2 are connected with the same phase RF current, an alternating non-uniform magnetic field in the shape of a magnetic mirror will be generated in the vacuum chamber 1 , the non-uniform magnetic field excites the ionization of the medium in the vacuum chamber to generate plasma, and drives the magnetic mirror magn...

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Abstract

The invention discloses a neutron beam injector ion source field reverse configuration plasma radio frequency driver, which comprises a vacuum cavity. Outside the vacuum cavity, two coils arranged in parallel are used as a radio frequency power supply antenna. Each coil consists of windings with 1.5 turns or more. The distance between the two coils is larger than the maximum gap between any windings. The two coils are connected with the same phase RF current and the magnetic fields generated by the coils share the same direction, and a metal Faraday cup is arranged at the inner side of the vacuum cavity. The present invention overcomes the shortcomings of the conventional plasma radio frequency driver of neutron beam injector ion source, which uses a uniform magnetic field confinement plasma mode. The driver of the invention utilizes an alternating non-uniform magnetic field and the driven self-magnetic field of the annular plasma current and establishes a field reversal configuration plasma confinement mode, therefore, preventing the Faraday cup from being in direct contact with the high temperature plasma and benefiting the temperature rise and the constraint of the plasma.

Description

technical field [0001] The invention relates to a plasma radio-frequency driver of an ion source of a neutral beam implanter, in particular to a plasma radio-frequency driver with a field reverse configuration capable of improving plasma confinement. Background technique [0002] At present, the structure of the plasma RF driver of the ion source of the known neutral beam implanter is: the vacuum chamber is made of cylindrical ceramics or quartz glass; The energy delivered in the body stimulates and confines the plasma; at the same time, in order to prevent the inner wall of the vacuum chamber from being bombarded and polluted by the plasma, a metal cylinder called a Faraday cylinder is installed inside the vacuum chamber. The equidistant solenoid generates a magnetic field that alternates in time and is uniform in space (hereinafter referred to as: uniform magnetic field) in the vacuum chamber, which excites the ionization of the medium in the vacuum chamber to generate pla...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05H1/46
CPCH05H1/46H05H1/4645
Inventor 李军胡纯栋吴斌刘智民谢远来吕波谢亚红韦江龙顾玉明刘胜蒋才超王进芳陈玉庆
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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