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Production line system

A technology for production line and power management, applied in general control system, control/regulation system, energy industry, etc., can solve problems such as complex overall system structure, and achieve the effect of simplifying the structure

Active Publication Date: 2021-02-19
MITSUBOSHI DIAMOND IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] Therefore, when a production line system is composed of multiple devices, since the same number of power switches and power management controllers are used as the number of devices, there is a problem that most of these parts are duplicated, and the overall system structure becomes complicated.

Method used

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Embodiment Construction

[0020] figure 1 It is a block diagram showing the configuration of the production line system according to the embodiment of the present invention. As shown in the drawing, the production line system of this embodiment is constituted by a plurality of devices 10 , 20 , 30 , 40 . Here, the loading (LD) device 10 is a loading device for transporting the substrate to the manufacturing system, the scribing device 20 is a scribing device for scribing the substrate, and the cutting device 30 is a cutting device for cutting the scribed substrate. device, the unloading device 40 is an unloading device for unloading the cut substrate. With regard to these devices 10 , 20 , 30 , and 40 , configurations specific to each device are omitted, and only a power supply portion related to the present embodiment is shown.

[0021] like figure 1 As shown, the loading device 10 has a power management unit 11 and a control circuit unit 12 . The power management unit 11 supplies power according ...

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Abstract

The present invention relates to a production line system capable of collectively controlling the power supply of the entire system in a production line system composed of a plurality of devices. The production line system is equipped with a plurality of devices (10, 20, 30, 40) constituting the production line system, a key switch (51) for turning on and off the overall power supply, a power management controller (52), and a system control system as a host control device. device (53). The power management controller (52) controls the power management part (11) of each device according to the state of the emergency stop switch (13, 23, 33, 43) and the box door switch (14, 24, 34, 44) arranged on each device. , 21, 31, 41). Thereby, the power supply of the entire production line system can be turned on and off with one key switch (51).

Description

technical field [0001] The present invention relates to a production line system composed of multiple devices and an upper control device, in particular to a production line system characterized by its power supply management. Background technique [0002] In conventional equipment manufacturing, etc., a system is used in which multiple devices are arranged in series to form a production line, and products processed by one device are sequentially transported to the next device to perform complex processing. Patent Document 1 discloses a substrate processing system in which a plurality of substrate processing apparatuses are connected to a host computer via a communication line. [0003] In addition, Patent Document 2 proposes a control circuit that performs logic processing based on the ON information of each start switch in a switchboard starting circuit that has a plurality of switchboards and activates each switchboard simultaneously, and controls the switchboard by the c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/418
CPCG05B19/41875Y02P90/02Y02P80/10
Inventor 栗山规由吉冈武志
Owner MITSUBOSHI DIAMOND IND CO LTD