Quartz glass and preparation method thereof
A quartz glass and compound technology, applied in glass manufacturing equipment, glass molding, manufacturing tools, etc., can solve problems such as inability to meet semiconductor application requirements, corrosion, and fast corrosion rates
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preparation example Construction
[0061] Such as figure 1 Shown, a kind of preparation method of quartz glass that one embodiment of the present invention proposes, it comprises:
[0062] Step 10, using a dissolving agent to dissolve and mix the first doping compound and the second doping compound to form a doping mixed solution, the first doping compound is an aluminum-containing compound, and the second doping compound includes a Zr-containing compound, At least one of Y-containing compounds, La-containing compounds, Sc-containing compounds, Th-containing compounds, V-containing compounds, and Ti-containing compounds;
[0063] Wherein, the dissolving agent can be a kind of dissolving agent, which can dissolve the first doping compound and the second doping compound simultaneously; or, the dissolving agent can include two kinds of dissolving agents, one kind of dissolving agent is used to dissolve the first Doping compound, another dissolving agent is used to dissolve the second doping compound, forming a do...
Embodiment approach
[0112] 1. Vacuum electric melting process melting method:
[0113] The crystalline doped silica powder is ground, and the doped silica powder after grinding is sieved to obtain the sieved silica powder, and the sieved The silicon dioxide powder is melted into the finished quartz glass by melting process at 1000-2500 degrees Celsius, specifically:
[0114] Sieve the doped silica powder after grinding to obtain doped silica powder with particles in the range of 20 to 200 mesh, and melt the doped silica powder with 20 to 200 mesh by vacuum electrofusion process The finished quartz glass.
[0115] 2. High-frequency plasma melting process Melting method:
[0116] The crystalline doped silica powder is ground, and the doped silica powder after grinding is sieved to obtain the sieved silica powder, and the sieved The silicon dioxide powder is melted into the finished quartz glass by melting process at 1000-2500 degrees Celsius, specifically:
[0117] Sieve the doped silica powder...
Embodiment 2
[0132] A kind of quartz glass that one embodiment of the present invention proposes, comprises:
[0133] Quartz glass finished product, prepared by the preparation method of said quartz glass finished quartz glass;
[0134] The preparation method of described quartz glass comprises:
[0135] The first doping compound and the second doping compound are dissolved and mixed by a dissolving agent to form a doping mixed solution, the first doping compound is an aluminum-containing compound, and the second doping compound includes a Zr-containing compound and a Y-containing compound , at least one of La-containing compounds, Sc-containing compounds, Th-containing compounds, V-containing compounds, and Ti-containing compounds;
[0136] Parts by volume L 1 silicon alkoxide, parts by volume L 2 of water, parts by volume L 3 Alcoholic organic solvents are mixed to form a silicon alkoxide solution;
[0137] The silicon alkoxide solution, the doping mixed solution and the catalyst ar...
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