Preparation method of quartz glass and quartz glass
A technology of quartz glass and compounds, applied in glass manufacturing equipment, glass molding, manufacturing tools, etc., can solve problems such as failure to meet semiconductor application requirements, fast corrosion rate, corrosion, etc.
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preparation example Construction
[0061] Such as figure 1 As shown, an embodiment of the present invention provides a method for preparing quartz glass, which includes:
[0062] Step 10. The first doping compound and the second doping compound are dissolved and mixed with a dissolving agent to form a doping mixed solution. The first doping compound is an aluminum-containing compound, and the second doping compound includes a Zr-containing compound, At least one of Y-containing compounds, La-containing compounds, Sc-containing compounds, Th-containing compounds, V-containing compounds, and Ti-containing compounds;
[0063] Wherein, the dissolving agent may be a kind of dissolving agent, which can dissolve the first doping compound and the second doping compound at the same time; or, the dissolving agent may include two dissolving agents, and one dissolving agent is used to dissolve the first doping compound. Doping compound, another dissolving agent is used to dissolve the second doping compound to form the doping m...
Embodiment approach
[0112] 1. Vacuum electric melting process melting method:
[0113] The crystalline doped silica powder is ground, and the ground doped silica powder is sieved to obtain the sieved silica powder. The silicon dioxide powder is melted into the quartz glass product at 1000-2500 degrees Celsius using a melting process, specifically:
[0114] The doped silica powder after grinding is sieved to obtain the doped silica powder with particles of 20-200 mesh, and the doped silica powder with 20-200 mesh is melted by vacuum electric melting process The finished quartz glass.
[0115] 2. High-frequency plasma melting process melting method:
[0116] The crystalline doped silica powder is ground, and the ground doped silica powder is sieved to obtain the sieved silica powder. The silicon dioxide powder is melted into the quartz glass product at 1000-2500 degrees Celsius using a melting process, specifically:
[0117] The ground doped silica powder is sieved to obtain the doped silica powder with a...
Embodiment 2
[0132] A quartz glass provided by an embodiment of the present invention includes:
[0133] Quartz glass product, prepared by the method for preparing the quartz glass product;
[0134] The method for preparing the quartz glass includes:
[0135] The first doping compound and the second doping compound are dissolved and mixed with a dissolving agent to form a doping mixed solution, the first doping compound is an aluminum-containing compound, and the second doping compound includes a Zr-containing compound and a Y-containing compound , At least one of La-containing compounds, Sc-containing compounds, Th-containing compounds, V-containing compounds, and Ti-containing compounds;
[0136] Volume parts L 1 Of silicon alkoxide, parts by volume L 2 Of water, volume L 3 Mixed with alcohol organic solvents to form silicon alkoxide solution;
[0137] The silicon alkoxide solution, the doped mixed solution and the catalyst are subjected to hydrolysis and polycondensation reaction to prepare dope...
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