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Preparation method of quartz glass and quartz glass

A technology of quartz glass and compounds, applied in glass manufacturing equipment, glass molding, glass production, etc., can solve problems such as failure to meet semiconductor application requirements, corrosion, and fast corrosion rate

Active Publication Date: 2019-08-13
CHINA BUILDING MATERIALS ACAD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] Si-O chemical bonds are easily corroded by hydrofluoric acid. According to calculations, in the hydrofluoric acid environment, the corrosion rate of quartz glass composed entirely of Si-O chemical bonds has reached 150 μm / h. The corrosion rate is faster in hydrofluoric acid environment, which cannot meet the application requirements of semiconductor etching in hydrofluoric acid environment

Method used

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  • Preparation method of quartz glass and quartz glass
  • Preparation method of quartz glass and quartz glass
  • Preparation method of quartz glass and quartz glass

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preparation example Construction

[0053] like figure 1 Shown, a kind of preparation method of quartz glass that one embodiment of the present invention proposes, it comprises:

[0054] Step 10, using a dissolving agent to dissolve and mix the first doping compound and the second doping compound to form a doping mixed solution, the first doping compound is an aluminum-containing compound, and the second doping compound includes a Zr-containing compound, At least one of Y-containing compounds, La-containing compounds, Sc-containing compounds, Th-containing compounds, V-containing compounds, and Ti-containing compounds;

[0055] Wherein, the dissolving agent can be a kind of dissolving agent, which can dissolve the first doping compound and the second doping compound simultaneously; or, the dissolving agent can include two kinds of dissolving agents, one kind of dissolving agent is used to dissolve the first Doping compound, another dissolving agent is used to dissolve the second doping compound, forming a dopin...

Embodiment 2

[0111] A kind of quartz glass that one embodiment of the present invention proposes, comprises:

[0112] Quartz glass finished product, prepared by the preparation method of said quartz glass finished quartz glass;

[0113] The preparation method of described quartz glass comprises:

[0114] The first doping compound and the second doping compound are dissolved and mixed by a dissolving agent to form a doping mixed solution, the first doping compound is an aluminum-containing compound, and the second doping compound includes a Zr-containing compound and a Y-containing compound , at least one of La-containing compounds, Sc-containing compounds, Th-containing compounds, V-containing compounds, and Ti-containing compounds;

[0115] React silicon dioxide particles from silicon-containing raw materials in a combustion flame at 500-1200°C, deposit the silicon dioxide particles to form a silicon dioxide loose body, and the silicon dioxide loose body has pores;

[0116] Soaking the ...

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Abstract

The invention relates to a method for preparing quartz glass and the quartz glass, relates to the field of quartz glass manufacture techniques, and mainly aims to improve the corrosion resistance of the quartz glass in hydrofluoric acid, fluorine and other fluorine-containing environment. The method comprises the steps that doped mixed solution is formed by dissolving and mixing a first doped compound and a second doped compound with dissolving agent, wherein the first doped compound is a compound containing aluminum, and the second doped compound is at least one of Zr-containing compound, Y-containing compound, La-containing compound, Sc-containing compound, Th-containing compound, V-containing compound and Ti-containing compound; a silicon dioxide loose body is soaked in the doped mixed solution, and is fired into the finished quartz glass. The finished quartz glass contains at least one of Al2O3 reformed by firing, ZrO2 reformed by firing, Y2O3, La2O3, Sc2O3, Th2O3, V2O5 and ThO2. Al2O3, ZrO2, Y2O3, La2O3, Sc2O3, Th2O3, V2O5 and ThO2 are filled in pores of a SiO2 tetrahedron network structure in the form of a network intermediate or a network modifier, and the quartz glass is resistant to sour corrosion.

Description

technical field [0001] The invention relates to the technical field of quartz glass manufacturing, in particular to a method for preparing quartz glass and the quartz glass. Background technique [0002] Quartz glass is an amorphous material with silicon dioxide as the main component. Its microstructure is a simple network composed of silicon dioxide tetrahedral structural units. Because the Si-O chemical bond energy is large and the structure is very tight, so Quartz glass has unique properties, such as high temperature resistance, low expansion coefficient, thermal shock resistance, high chemical stability and good electrical insulation properties. [0003] Due to the unique properties of quartz glass, it is an irreplaceable ideal auxiliary material in the manufacturing process of semiconductor integrated circuits, including quartz glass tubes, quartz glass sheets, quartz glass rings, quartz glass plates, quartz glass flanges, and quartz glass groove boats. , Quartz glass...

Claims

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Application Information

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IPC IPC(8): C03B20/00
CPCY02P40/57
Inventor 聂兰舰向在奎贾亚男王蕾邵竹锋王慧张辰阳符博王玉芬
Owner CHINA BUILDING MATERIALS ACAD