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Preparation method of quartz glass and quartz glass

A technology of quartz glass and compounds, applied in glass manufacturing equipment, glass molding, manufacturing tools, etc., can solve problems such as failure to meet semiconductor application requirements, corrosion, and fast corrosion rate

Active Publication Date: 2019-02-19
CHINA BUILDING MATERIALS ACAD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Si-O chemical bonds are easily corroded by hydrofluoric acid. According to calculations, in the hydrofluoric acid environment, the corrosion rate of quartz glass composed entirely of Si-O chemical bonds has reached 150 μm / h. The corrosion rate is faster in hydrofluoric acid environment, which cannot meet the application requirements of semiconductor etching in hydrofluoric acid environment

Method used

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  • Preparation method of quartz glass and quartz glass
  • Preparation method of quartz glass and quartz glass
  • Preparation method of quartz glass and quartz glass

Examples

Experimental program
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Effect test

preparation example Construction

[0060] Such as figure 1 Shown, a kind of preparation method of quartz glass that one embodiment of the present invention proposes, it comprises:

[0061]Step 10, using a dissolving agent to dissolve and mix the first doping compound and the second doping compound to form a doping mixed solution, the first doping compound is an aluminum-containing compound, and the second doping compound includes a Zr-containing compound, At least one of Y-containing compounds, La-containing compounds, Sc-containing compounds, Th-containing compounds, V-containing compounds, and Ti-containing compounds;

[0062] Wherein, the dissolving agent can be a kind of dissolving agent, which can dissolve the first doping compound and the second doping compound simultaneously; or, the dissolving agent can include two kinds of dissolving agents, one kind of dissolving agent is used to dissolve the first Doping compound, another dissolving agent is used to dissolve the second doping compound, forming a dop...

Embodiment approach

[0110] 1. Vacuum electric melting process melting method:

[0111] The crystalline doped silica powder is ground, and the doped silica powder after grinding is sieved to obtain the sieved silica powder, and the sieved The silicon dioxide powder is melted into the finished quartz glass by melting process at 1000-2500 degrees Celsius, specifically:

[0112]Sieve the doped silica powder after grinding to obtain doped silica powder with particles in the range of 20 to 200 mesh, and melt the doped silica powder with 20 to 200 mesh by vacuum electrofusion process The finished quartz glass.

[0113] 2. High-frequency plasma melting process Melting method:

[0114] The crystalline doped silica powder is ground, and the doped silica powder after grinding is sieved to obtain the sieved silica powder, and the sieved The silicon dioxide powder is melted into the finished quartz glass by melting process at 1000-2500 degrees Celsius, specifically:

[0115] Sieve the doped silica powder ...

Embodiment 2

[0130] A kind of quartz glass that one embodiment of the present invention proposes, comprises:

[0131] Quartz glass finished product, prepared by the preparation method of said quartz glass finished quartz glass;

[0132] The preparation method of described quartz glass comprises:

[0133] The first doping compound and the second doping compound are dissolved and mixed by a dissolving agent to form a doping mixed solution. The first doping compound is an aluminum-containing compound, and the second doping compound includes a Zr-containing compound and a Y-containing compound. , at least one of La-containing compounds, Sc-containing compounds, Th-containing compounds, V-containing compounds, and Ti-containing compounds;

[0134] Parts by volume L 1 Doping mixed solution, parts by volume L 2 After the water is mixed, react with silicon tetrachloride liquid phase to obtain doped silica gel;

[0135] The doped silica gel is fired into a finished quartz glass product through ...

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Abstract

The invention relates to a preparation method of quartz glass and the quartz glass, relates to the technical field of quartz glass manufacturing, and mainly aims at improving corrosion resistance of a finished quartz glass product in hydrofluoric acid, fluorine F2 and other fluorine-containing environments. The method comprises the steps that a first doped compound and a second doped compound are dissolved through a solvent and mixed to form a doped mixed solution, wherein the first doped compound is an aluminum-containing compound; the doped mixed solution and water are mixed and then react with a silicon tetrachloride liquid phase to obtain doped silicon dioxide gel; the doped silicon dioxide gel is fired to be a finished quartz glass product through a firing technology, and the finished quartz glass product comprises Al2O3 formed through conversion after being fired with the doped mixed solution and at least one of ZrO2, Y2O3, La2O3, Sc2O3, ThO2, V2O5 and TiO2 which are formed through conversion after being fired with the doped mixed solution. Holes of a SiO2 tetrahedral network structure are filled with Al2O3, ZrO2, Y2O3, La2O3, Sc2O3, ThO2, V2O5 and TiO2 which are in a network intermediate or network outer body mode, and the quartz glass is resistant to acid corrosion.

Description

technical field [0001] The invention relates to the technical field of quartz glass manufacturing, in particular to a method for preparing quartz glass and the quartz glass. Background technique [0002] Quartz glass is an amorphous material with silicon dioxide as the main component. Its microstructure is a simple network composed of silicon dioxide tetrahedral structural units. Because the Si-O chemical bond energy is large and the structure is very tight, so Quartz glass has unique properties, such as high temperature resistance, low expansion coefficient, thermal shock resistance, high chemical stability and good electrical insulation properties. [0003] Due to the unique properties of quartz glass, it is an irreplaceable ideal auxiliary material in the manufacturing process of semiconductor integrated circuits, including quartz glass tubes, quartz glass sheets, quartz glass rings, quartz glass plates, quartz glass flanges, and quartz glass groove boats. , Quartz glass...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C3/06C03C1/02C03B20/00
CPCC03B20/00C03C1/02C03C3/06C03C2201/30C03C2201/3405C03C2201/3411C03C2201/3417C03C2201/36C03C2201/40
Inventor 聂兰舰向在奎贾亚男王蕾邵竹锋王慧张辰阳符博王玉芬
Owner CHINA BUILDING MATERIALS ACAD