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Alkaline cleaning technology for sapphire diaphragm

A technology of sapphire and window, which is applied in the field of sapphire, can solve the problems of high chemical danger, sulfur is unfavorable for environmental protection, etc., and achieve the effects of high safety, low cost and convenient preparation

Inactive Publication Date: 2017-02-15
江苏吉星新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The problem to be solved by the present invention is to provide an alkaline cleaning process for sapphire windows, which solves the problem that during the sapphire processing process, sulfuric acid cleaning process is mostly used for wafer cleaning, which is highly chemically dangerous and the sulfur produced in the cleaning process is not conducive to environmental protection.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] Embodiment 1: a kind of sapphire window alkaline cleaning process, its cleaning process is as follows:

[0019] (1) Slab production: First, the sapphire workpiece is made into a double-sided polished sapphire sheet by cutting, grinding and polishing, and the thickness of the double-sided polished sapphire sheet is 0.5mm;

[0020] (2) The first cleaning: put the prepared double-sided polished sapphire sheet into the cleaning tank of the first weak alkaline environmental protection cleaning agent for cleaning. The cleaning time is 25 minutes, and it is thrown up and down 30 times per minute. The temperature in the cleaning tank of alkaline environmental protection cleaning agent is 70°C;

[0021] (3) The second cleaning: Put the cleaned double-sided polished sapphire sheet into the first ultrapure water cleaning tank for cleaning. The cleaning time is 25 minutes, and it is thrown up and down 30 times per minute. The first ultrapure water cleaning tank The temperature ins...

Embodiment 2

[0028] Embodiment 2: a kind of sapphire window alkaline cleaning process, its cleaning process is as follows:

[0029] (1) Slab production: First, the sapphire workpiece is made into double-sided polished sapphire slices by cutting, grinding and polishing, and the thickness of the double-sided polished sapphire slices is 0.6mm;

[0030] (2) The first cleaning: Put the prepared double-sided polished sapphire sheet into the cleaning tank of the first weak alkaline environmental protection cleaning agent for cleaning. The cleaning time is 20 minutes, and it is thrown up and down 20 times per minute. The temperature in the alkaline environmental cleaning agent cleaning tank is 60°C;

[0031] (3) The second cleaning: Put the cleaned double-sided polished sapphire sheet into the first ultrapure water cleaning tank for cleaning. The cleaning time is 15 minutes, and it is thrown up and down 10 times per minute. The first ultrapure water cleaning tank The temperature inside is 50°C; ...

Embodiment 3

[0038] Embodiment 3: a kind of alkaline cleaning process of sapphire window plate, its cleaning process is as follows:

[0039] (1) Slab production: First, the sapphire workpiece is made into double-sided polished sapphire slices by cutting, grinding and polishing, and the thickness of the double-sided polished sapphire slices is 0.8mm;

[0040] (2) The first cleaning: put the prepared double-sided polished sapphire sheet into the cleaning tank of the first weak alkaline environmental protection cleaning agent for cleaning. The cleaning time is 30 minutes, and it is thrown up and down 40 times per minute. The temperature in the cleaning tank of alkaline environmental protection cleaning agent is 80°C;

[0041] (3) The second cleaning: Put the cleaned double-sided polished sapphire sheet into the first ultrapure water cleaning tank for cleaning. The cleaning time is 45 minutes, and it is thrown up and down 30 times per minute. The first ultrapure water cleaning tank The temper...

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PUM

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Abstract

The invention provides an alkaline cleaning technology for a sapphire diaphragm. A sapphire workpiece is made into a double-face polished sapphire sheet through cutting, grinding and polishing firstly, and then, the double-face polished sapphire sheet is finally cleaned. The steps are simple, and preparing is convenient. The whole cleaning process comprises cleaning through an alkalescence environment-friendly cleaning agent two times and cleaning through ultra-pure water five times. Compared with an original cleaning technology, the alkaline cleaning technology is used for conducting cleaning and is more environment-friendly, the chip cleanliness degree is high, and safety is high; and meanwhile, cost is low, and safety and environment-friendliness are achieved.

Description

technical field [0001] The invention relates to the technical field of sapphire, in particular to an alkaline cleaning process for a sapphire window. Background technique [0002] Sapphire crystal has excellent optical properties, physical properties and stable chemical properties, and is widely used in high-brightness LED substrate materials, various optical components, and scanner window materials. The sapphire window has the following excellent characteristics in the field of optical windows: 1. High optical transmittance, sapphire crystal has good light transmission performance, and its light transmission range is 0.15-7.5 microns, covering ultraviolet, visible and near-infrared , mid-infrared and other bands; 2. High wear resistance, the expansion coefficient is only 5X10-6 / degree, the melting point is 2050°C, the working temperature can reach 1900°C, and has excellent thermal shock resistance and high temperature resistance; 3. Good mechanical properties, its hardness...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B3/04B08B3/08B08B3/10
CPCB08B3/04B08B3/08B08B3/10
Inventor 胡孔林孙敦陆
Owner 江苏吉星新材料有限公司
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