Surface acoustic wave double-resonator integrated torque sensor based on Rayleigh wave mode

Abstract

The invention relates to a surface acoustic wave double-resonator integrated torque sensor based on a Rayleigh wave mode. The surface acoustic wave double-resonator integrated torque sensor comprises a rotation shaft elastomer and a reader, a rectangular quartz substrate is fixed on the surface of the rotation shaft elastomer, two orthogonally placed surface acoustic wave resonators are manufactured at a time on the quartz substrate through an IC process, resonance directions of the surface acoustic wave resonators respectively symmetrically form angles of + / -45 degrees with a quartz crystal axis X, two upper electrodes and two lower electrodes of IDTs of the two surface acoustic wave resonators are connected through metal busbars to form a parallel differential structure, during pasting measurement of the rotation shaft elastomer, it is ensured that long sides of the quartz substrate are parallel to a rotation shaft axis through a technology, the two surface acoustic wave resonators and a reader nearby a detected rotation shaft respectively receive / emit excitation signals and emit / receive response signals of the resonators through antennas, and thus real-time measurement of torque is realized. The structure is easily realized, the structure helps to improve torque measurement convenience and precision, and a new technical means is provided for torque sensor design and rotation shaft torque measurement.

Description

technical field [0001] The invention relates to a shafting torque testing technology, in particular to a surface acoustic wave dual resonator integrated torque sensor based on a Rayleigh wave mode. Background technique [0002] Shafting torque test is an indispensable content for various mechanical product development, quality inspection, optimization control, working condition monitoring and fault diagnosis. The realization of torque measurement needs to solve three problems of sensor, energy supply and signal transmission. The wireless passive sensing technology based on Surface Acoustic Wave (SAW) technology is used to measure the torque of the rotating shaft, which just avoids the energy and signal transmission problems faced by general active sensors, thus greatly improving the simplicity and reliability of the test. [0003] After searching the existing technical documents, it was found that the document "Research on Wireless Passive Surface Acoustic Wave Torque Senso...

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Problems solved by technology

[0004] After searching the existing technical literature, it was found that "Surface Acoustic Wave Torque Sensor Structure Design and Signal Extraction Method Research", "Surface Acoustic Wave Sensor Design for Torque Detection of Ship Drive Shaft", "A Surface Acoustic Wave Torque Sensor Academic papers such as "Design of Fast Demodulation Method" all focus on the overall scheme of the sensing system and its echo signal extraction and analysis, without disclosing the structure and specific technical parameters of the specific sensitive unit

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