Triaxial fluxgate sensor

Abstract

The invention discloses a triaxial fluxgate sensor, which comprises an x-y biaxial planar fluxgate sensor and a z-axis uniaxial planar fluxgate sensor, wherein an x-y biaxial chip comprises two independent uniaxial planar fluxgate sensor units which are in orthogonal distribution and arranged on a same silicon substrate, and the z-axis uniaxial planar fluxgate sensor comprises a substrate only which is made of large-thickness glass. By utilizing a silicon-glass bonding technology, the side surface of a short axial end of a z-axis uniaxial chip is bonded and fixed on the surface of the silicon substrate of the x-y biaxial chip, so that a magnetic sensitive axis of the z-axis uniaxial chip is perpendicularly orthogonal to x and y axial magnetic sensitive axes of the x-y biaxial chip, thereby realizing x, y and z orthogonality three-component detection of a magnetic field. The triaxial fluxgate sensor solves the problem of large size, heavy weight and high power consumption of an existing triaxial fluxgate sensor, and fully utilizes the advantages of small size, low power consumption, high consistency and small bonding alignment orthogonal error of a uniaxial fluxgate sensor chip of the micro-electro-mechanical system.

Description

technical field [0001] The invention relates to the field of micro-electromechanical systems, in particular to a three-axis fluxgate sensor for measuring weak magnetic fields. Background technique [0002] As a traditional weak magnetic field detection device, the fluxgate sensor has always had its unique advantages and cannot be replaced by other magnetic field sensors. In recent years, it has continuously discovered its application potential in new fields, such as GPS positioning of small mobile devices, Missile inertial guidance, small satellite azimuth and attitude control, motion detection in virtual reality space, etc. In recent years, since applications of various fields have been gradually expanded, requirements for devices tend to be thinner, lighter, and cheaper. Correspondingly, fluxgate sensors are also trying to become thinner, lighter, and cheaper. [0003] The traditional fluxgate sensor uses a solid skeleton as the base, fixes the soft tape-like magnetic co...

AI Technical Summary

Problems solved by technology

Since a through hole needs to be drilled in the manufacturing process to realize the upper and lower communication of the magnetic core, the sensor may be damaged during the through hole process

Also, fluxgate sensors perform poorly according to this method compared to MEMS technology

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