Triaxial fluxgate sensor

A fluxgate sensor and door sensor technology, applied in the field of micro-electromechanical systems, can solve problems such as poor performance of fluxgate sensors and sensor damage, and achieve the effects of high consistency, shortened size, and reduced application costs

Inactive Publication Date: 2017-02-15
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since a through hole needs to be drilled in the manufacturing process to realize the upper and lower communication of the magnetic core, the sensor may be damaged during the through hole process
Also, fluxgate sensors perform poorly according to this method compared to MEMS technology

Method used

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Embodiment Construction

[0029] The idea, specific structure and technical effects of the present invention will be further described below in conjunction with the accompanying drawings, so as to fully understand the purpose, features and effects of the present invention.

[0030] Such as Figure 1-4As shown, the quasi-integrated three-axis fluxgate sensor of the present invention includes an x-y biaxial planar fluxgate sensor chip 1 and a z-axis uniaxial planar fluxgate sensor chip 2; wherein the x-y biaxial planar fluxgate sensor chip Chip 1 includes two orthogonally distributed single-axis planar fluxgate sensor units 3 of 10mm*5mm*0.2mm in size on the same silicon substrate 4 with a thickness of 0.5mm, and the single-axis planar fluxgate sensor unit Contains a silicon substrate 4, an excitation coil 6, a detection coil 7, a magnetic core 8, an electrode 9 and a polyimide film 10. The z-axis uniaxial planar fluxgate sensor chip 2 with a size of 10mm*5mm*3.2mm and x-y The uniaxial planar fluxgate s...

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Abstract

The invention discloses a triaxial fluxgate sensor, which comprises an x-y biaxial planar fluxgate sensor and a z-axis uniaxial planar fluxgate sensor, wherein an x-y biaxial chip comprises two independent uniaxial planar fluxgate sensor units which are in orthogonal distribution and arranged on a same silicon substrate, and the z-axis uniaxial planar fluxgate sensor comprises a substrate only which is made of large-thickness glass. By utilizing a silicon-glass bonding technology, the side surface of a short axial end of a z-axis uniaxial chip is bonded and fixed on the surface of the silicon substrate of the x-y biaxial chip, so that a magnetic sensitive axis of the z-axis uniaxial chip is perpendicularly orthogonal to x and y axial magnetic sensitive axes of the x-y biaxial chip, thereby realizing x, y and z orthogonality three-component detection of a magnetic field. The triaxial fluxgate sensor solves the problem of large size, heavy weight and high power consumption of an existing triaxial fluxgate sensor, and fully utilizes the advantages of small size, low power consumption, high consistency and small bonding alignment orthogonal error of a uniaxial fluxgate sensor chip of the micro-electro-mechanical system.

Description

technical field [0001] The invention relates to the field of micro-electromechanical systems, in particular to a three-axis fluxgate sensor for measuring weak magnetic fields. Background technique [0002] As a traditional weak magnetic field detection device, the fluxgate sensor has always had its unique advantages and cannot be replaced by other magnetic field sensors. In recent years, it has continuously discovered its application potential in new fields, such as GPS positioning of small mobile devices, Missile inertial guidance, small satellite azimuth and attitude control, motion detection in virtual reality space, etc. In recent years, since applications of various fields have been gradually expanded, requirements for devices tend to be thinner, lighter, and cheaper. Correspondingly, fluxgate sensors are also trying to become thinner, lighter, and cheaper. [0003] The traditional fluxgate sensor uses a solid skeleton as the base, fixes the soft tape-like magnetic co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/04
CPCG01R33/05
Inventor 雷冲周勇
Owner SHANGHAI JIAO TONG UNIV
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