Capacitor type fingerprint sensor
A fingerprint sensor, capacitive technology, applied in the direction of acquiring/arranging fingerprints/palmprints, instruments, characters and pattern recognition, etc., can solve the problems of small effective signal, easy saturation of the integrator, and small output dynamic range of the integrator. To achieve the effect of increasing the dynamic range
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[0018] The implementation of the present application will be described in detail below in conjunction with the drawings and examples, so that the realization process of how the present application uses technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.
[0019] figure 1 It is a schematic diagram of a typical fingerprint sensor structure; figure 1 As shown, the fingerprint sensor produced according to one layer of polysilicon six-layer metal (referred to as 1P6M) may include N-th layer metal 101, N-1-th layer metal 102, N-2-th layer metal 103, N-3-th layer metal 104, Where N represents the uppermost layer of metal in the fingerprint sensor manufacturing process. In this embodiment, N is equal to 6, and the Nth layer of metal 101 is the sixth layer of metal, the N-1st layer of metal 102 is the fifth layer of metal, and the N-2nd layer of metal Layer metal 103 is the fourth layer of metal, N-3th layer of...
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Abstract
Description
Claims
Application Information
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