Three-shaft fluxgate sensor

Abstract

The invention discloses a micro electro mechanical system three-shaft fluxgate sensor based on silicon cube-glass bonding, and relates to the field of micro electro mechanical systems. The three-shaft fluxgate sensor comprises a 1 cubic centimeter silicon cube base and three micro electro mechanical system single-shaft fluxgate sensor chips. Each micro electro mechanical system single-shaft fluxgate sensor chip comprises a glass substrate, an exciting coil, a detecting coil, a magnetic core, an electrode and a polyimide film. The three micro electro mechanical system single-shaft fluxgate sensor chips are precisely located and fixed to three planes with orthorhombic peaks of the silicon cube base respectively in the three orthorhombic directions through silicon-glass bonding. The problem that an existing three-shaft fluxgate sensor is large in size, large in weight and large in power consumption is solved, and bonding of the micro electro mechanical system single-shaft fluxgate sensor chips and the silicon cube base is adopted for the micro electro mechanical system three-shaft fluxgate sensor adopting silicon cube-glass bonding, so that the size of the high-precision three-shaft fluxgate sensor is effectively reduced.

Description

technical field [0001] The invention relates to the field of microelectromechanical systems, in particular to a silicon cube-glass bonding microelectromechanical system three-axis fluxgate sensor for measuring weak magnetic fields. Background technique [0002] As a traditional weak magnetic field detection device, the fluxgate sensor has always had its unique advantages and cannot be replaced by other magnetic field sensors. In recent years, it has continuously discovered its application potential in new fields, such as GPS positioning of small mobile devices, Missile inertial guidance, small satellite azimuth and attitude control, motion detection in virtual reality space, etc. In recent years, since applications of various fields have been gradually expanded, requirements for devices tend to be thinner, lighter, and cheaper. Correspondingly, fluxgate sensors are also trying to become thinner, lighter, and cheaper. [0003] The traditional fluxgate sensor uses a solid sk...

AI Technical Summary

Problems solved by technology

Since a through hole needs to be drilled in the manufacturing process to realize the upper and lower communication of the magnetic core, the sensor may be damaged during the through hole process

Also, fluxgate sensors perform poorly according to this method compared to MEMS technology

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