62results about How to "Less prone to stress" patented technology

The invention discloses a low-noise micro plane fluxgate sensor based on main and auxiliary coil double incentive. The low-noise micro plane fluxgate sensor based on the main and auxiliary coil double incentive comprises a substrate, main incentive coils, auxiliary incentive coils, detecting coils, a magnetic core, electrodes and a polyimide film. Two ends of each of two long shafts of the magnetic core are symmetrically provided with two groups of the main incentive coils in a wound mode, wherein the two long shafts are arranged in parallel. The middle portions of the long shafts are symmetrically provided with three groups of the detecting coils and two groups of the auxiliary incentive coils in a wound mode. In the same long shaft, one group of the auxiliary incentive coils are arranged between each two groups of the detecting coils. The main incentive coils, the auxiliary incentive coils and the detecting coils are all arranged on the surface of the substrate. Two ends of each main incentive coil are connected with the electrodes. The low-noise micro plane fluxgate sensor based on the main and auxiliary coil double incentive solves the problems that a traditional fluxgate sensor is poor in manufacturing stability and repeatability, utilizes the main and auxiliary coil double incentive to improves the incentive efficiency of the micro fluxgate sensor, effectively lowers output signal noise and energy consumption, is capable of being manufactured together with an interface circuit in an integrated mode, and can be widely used in many novel fields.

The invention discloses a silicon carbide based integrated micro fluxgate sensor, which comprises a silicon carbide substrate, an excitation coil, a detection coil, a magnetic core, electrodes and silicon carbide films, and is characterized in that the rectangular magnetic core is located in a rectangular groove at the surface of the silicon carbide substrate, and the upper surface of the magnetic core is flush with the surface of the silicon carbide substrate; both the excitation coil and the detection coil are a micro electromechanical three-dimensional solenoid coil, bottom coils of the excitation coil and the detection coil are located in a microgroove array at the bottom of the rectangular groove, electrified wires of the bottom coils are insulated by the silicon carbide substrate at clearances of the microgroove array, and the bottom coils are insulated from the magnetic core through chemical vapor deposition silicon carbide films; top coils of the excitation coil and the detection coil are insulated from the magnetic core through the chemical vapor deposition silicon carbide films, and clearances of electrified wires of the top coils are filled and insulated by the chemical vapor deposition silicon carbide films; the surface of the sensor is covered by the chemical vapor deposition silicon carbide films and is isolated and protected from the air, and the electrodes are exposed via through holes.