Miniaturized fluxgate sensor of micro-electro-mechanism system

A technology of fluxgate sensor and micro-electromechanical system, applied in the field of magnetic sensor, can solve the problems of poor mechanical properties of photoresist, large influence of external impact, poor thermal stability, etc., and achieve high sensitivity, good binding force and stability Good results

CN101481083AInactive Publication Date: 2009-07-15SHANGHAI JIAO TONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2009-07-15
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention provides a minimized fluxgate sensor of a micro electromechanical system in the micro electromechanical technical field. The minimized fluxgate sensor comprises an underlay, drive coils, receiving coils, a magnetic core, pins and polyimide insulating material, wherein the closed rectangular magnetic core is symmetrically wound with two groups of connected three-dimensional solenoid drive coils and is wound with a group of three-dimensional solenoid receiving coils perpendicular to the drive coils, the drive coils and the receiving coils are insulated and separated from the magnetic core by the polyimide insulating material, the drive coils and the receiving coils are positioned on the underlay, and the two ends are connected with the pins. The magnetic core material is plated NiFe alloy. The invention solves the problems of the traditional fluxgate sensor of difficult installation and debugging, poor stability and poor repetitiveness, ensures that the production technique is compatible with the large-scale integrated circuit technique, can be manufactured by integrating the interface circuit, and is widely applied in a plurality of new fields.
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Description

Technical field

[0001] The invention relates to a magnetic sensor in the field of microelectromechanical technology, in particular to a miniaturized fluxgate sensor based on microelectromechanical system (MEMS) technology. Background technique

[0002] Magnetic sensor is a solid-state device that can not only sense magnetic field but also obtain information from it. It converts information related to magnetic induction into electrical signals. The use of magnetic sensors to detect and measure magnetic fields, especially the detection and measurement of weak magnetic fields, has very important application prospects and technical values ​​in automotive electronics, industrial process control, biomedicine, and aerospace. As a highly sensitive weak magnetic field sensor, it can be widely used in electronic compasses and navigation systems for ships and vehicles, interstellar magnetic field measurement and applications, aircraft and microsatellite flight attitude control, submarine de...

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Embodiment Construction

[0021] The embodiments of the present invention will be described in detail below with reference to the drawings: this embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation modes and specific operation procedures are given, but the protection scope of the present invention is not limited to the following Mentioned examples.

[0022] Such as Figure 1-3 As shown, this embodiment includes a substrate 1, an excitation coil 2, a receiving coil 3, a magnetic core 4, a pin 5, and a polyimide insulating material 6. The closed rectangular magnetic core 4 is symmetrically wound with two sets of connected three-dimensional The solenoid excitation coil 2 is wound with a group of three-dimensional solenoid receiving coils 3 perpendicular to the excitation coil 2; the excitation coil 2 is located on the substrate 1, and is formed by connecting the bottom coil 7 and the top coil 9 through the connecting conductor 8. The excitatio...