Miniaturized fluxgate sensor of micro-electro-mechanism system

Abstract

The invention provides a minimized fluxgate sensor of a micro electromechanical system in the micro electromechanical technical field. The minimized fluxgate sensor comprises an underlay, drive coils, receiving coils, a magnetic core, pins and polyimide insulating material, wherein the closed rectangular magnetic core is symmetrically wound with two groups of connected three-dimensional solenoid drive coils and is wound with a group of three-dimensional solenoid receiving coils perpendicular to the drive coils, the drive coils and the receiving coils are insulated and separated from the magnetic core by the polyimide insulating material, the drive coils and the receiving coils are positioned on the underlay, and the two ends are connected with the pins. The magnetic core material is plated NiFe alloy. The invention solves the problems of the traditional fluxgate sensor of difficult installation and debugging, poor stability and poor repetitiveness, ensures that the production technique is compatible with the large-scale integrated circuit technique, can be manufactured by integrating the interface circuit, and is widely applied in a plurality of new fields.

Description

Technical field [0001] The invention relates to a magnetic sensor in the field of microelectromechanical technology, in particular to a miniaturized fluxgate sensor based on microelectromechanical system (MEMS) technology. Background technique [0002] Magnetic sensor is a solid-state device that can not only sense magnetic field but also obtain information from it. It converts information related to magnetic induction into electrical signals. The use of magnetic sensors to detect and measure magnetic fields, especially the detection and measurement of weak magnetic fields, has very important application prospects and technical values ​​in automotive electronics, industrial process control, biomedicine, and aerospace. As a highly sensitive weak magnetic field sensor, it can be widely used in electronic compasses and navigation systems for ships and vehicles, interstellar magnetic field measurement and applications, aircraft and microsatellite flight attitude control, submarine de...

AI Technical Summary

Problems solved by technology

The author adopts the parallel fluxgate structure design, the excitation coil and the receiving coil are in a parallel position, the excitation coil and the receiving coil interact with each other, and the device has a low measurement range

In addition, the author uses photoresist as the insulating layer. Photoresist has the disadvantages of poor mechanical properties, low strength, poor insulation and poor thermal stability, and is greatly affected by external shocks.

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