A vacuum evaporation machine and evaporation method thereof

An evaporation machine and vacuum technology, applied in the field of flat panel displays, can solve the problems of easy deformation of FMM storage and increased difficulty of FMM manufacturing

Active Publication Date: 2019-12-31
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] (1) FMM needs to be cleaned and re-netted regularly;
[0006] (2) FMM is prone to deformation during storage, transportation and use;
[0007] (3) With the development needs of high-resolution and large-scale flat panel display technology, the difficulty of FMM manufacturing is an important factor restricting its development

Method used

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  • A vacuum evaporation machine and evaporation method thereof
  • A vacuum evaporation machine and evaporation method thereof

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Embodiment Construction

[0032] The embodiments of the present invention will be described in detail below.

[0033] The invention provides a vacuum evaporation machine capable of evaporating a material to be evaporated onto a substrate without a metal mask. Take the process of preparing three color blocks of color filters by using this vacuum evaporation machine as an example.

[0034] Such as figure 1 As shown, the vacuum evaporation machine of the present invention includes a console 100 on which a printing platform 110 , a printing device 120 , a driving device 130 , an automatic alignment device 140 , and a gap monitoring device 150 are arranged.

[0035] The printing platform 110 is installed on the console 100 , and the printing platform 110 is used for carrying the substrate 200 provided with the spacer 210 . Specifically, spacers 210 of a certain height are arranged around each sub-pixel to limit the diffusion of materials to regions other than the corresponding sub-pixel. Preferably, the ...

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Abstract

The invention relates to the technical field of panel display, particularly to a vacuum evaporator. The vacuum evaporator comprises a console, a printing table mounted on the console, and a printing device, wherein the printing table is used for bearing a substrate provided with separators; and the printing device is arranged corresponding to the printing table, and is used for evaporating various materials on evaporation zones, between every two adjacent separators, of the substrate. According to the vacuum evaporator, fine metal masks (FMM) are not utilized, so that the problems that the FMMs need to be regularly cleaned, nets need to be reset, and the FMMs are liable to deform during the storage, transportation and utilization processes are solved, and conveying and bearing manners of the substrate are simplified as well.

Description

technical field [0001] The invention belongs to the technical field of flat panel displays, and in particular improves the preparation process of color filters in liquid crystal displays. Background technique [0002] Compared with the current mainstream liquid crystal display technology, OLED display technology has outstanding advantages such as high contrast, wide color gamut, flexibility, thinness, and energy saving. In recent years, OLED display technology has gradually become popular in mobile devices such as smartphones and tablets, flexible wearable devices such as smart watches, large-size curved TVs, and white lighting, and has a strong momentum of development. [0003] Among them, the quality of the color filter directly affects the quality of OLED display. In the prior art, the preparation of the red, green and blue color blocks (RGB) of the color filter is completed by using a vacuum evaporation machine. The metal mask (FMM) is a necessary part of the existing ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/04C23C14/54
CPCC23C14/04C23C14/24C23C14/54
Inventor 沐俊应
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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