A graphene trough waveguide photodetector

Abstract

Provided is a graphene groove waveguide photodetector. The graphene groove waveguide photodetector has higher detection responsivity and photoelectric conversion efficiency than a common graphene waveguide photodetector. The graphene groove waveguide photodetector comprises: a lower sleeve layer (10); at least two core layers (11) disposed on the lower sleeve layer (10) at an interval, at least one core layer (11) of the at least two core layers (11) being in contact with the lower sleeve layer (10); groove layers (12) disposed on the lower sleeve layer (10) and between adjacent core layers (11), the number of the groove layers (12) being greater than or equal to 1, and the refractive index of each groove layer (12) being less than the refractive index of two core layers (11) adjacent to the groove layer (12); and a grapheme layer (13) and two metal electrodes (14), the grapheme layer (13) being in contact with at least one groove layer (12) of the groove layers (12) or the grapheme layer (13) being disposed in at least one groove layer (12) of the groove layers (12), and the grapheme layer (13) being in contact with at least one metal electrode (14) of the two metal electrodes (14).

Description

technical field [0001] The invention relates to the field of optoelectronic technology, in particular to a graphene groove waveguide photodetector. Background technique [0002] Optical devices made of new material graphene, such as graphene waveguide photodetectors, are more and more widely used in the communication band. Due to its unique two-dimensional structural characteristics and linear electron energy dispersion, graphene has unique physical properties, such as the ability to absorb light in the visible to mid-infrared band, and has ultra-high electron mobility. [0003] At present, a schematic diagram of the structure of the graphene waveguide photodetector developed by people is as follows: figure 1 As shown, the simulation diagram of the optical mode (English: optical mode) detected by the graphene waveguide photodetector is figure 2 shown. figure 1 In, the incident light is in the silicon (chemical symbol: Si) as the core layer, fused silica (English: fused s...

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Problems solved by technology

[0004] However, since the detection responsivity of the graphene waveguide photodetector and its photoelectric conversion efficiency are proportional to the electric field intensity of the optical mode in the region where the graphene is located, when the graphene waveguide photodetector with the above structure is used, as figure 2 As shown, since the region where the graphene is located is the evanescent field of the optical mode (the electric field intensity of the evanescent field is low), the electric field intensity of the optical mode in the region where the graphene is located is relatively low, resulting in the graphene waveguide photodetector. The detection responsivity and its photoelectric conversion efficiency are low

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