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Preparation method of aluminum alloy for semiconductor

An aluminum alloy and semiconductor technology, applied in the field of alloys, can solve the problem that the content of impurity elements in the aluminum alloy cannot meet the design requirements, and achieve the effects of improving composition segregation, improving quality and uniform mixing

Inactive Publication Date: 2017-05-24
宁波创润新材料有限公司
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Problems solved by technology

[0004] However, the content of impurity elements in aluminum alloys produced in the prior art cannot meet the design requirements

Method used

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  • Preparation method of aluminum alloy for semiconductor

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preparation example Construction

[0039] In order to solve the technical problem, the present invention provides a method for preparing an aluminum alloy for semiconductors, comprising:

[0040] Provide aluminum material and alloy material; melt the aluminum material; add alloy material to the molten aluminum material to form aluminum alloy material, and sequentially carry out stirring and slag removal, exhaust refining; vacuum static exhaust for the aluminum alloy material Processing; sampling and analyzing the aluminum alloy material to determine whether the composition ratio of the aluminum alloy material meets the design requirements; when the composition ratio does not meet the design requirements, add alloy material or aluminum material again according to the analysis results to Make the composition ratio of the aluminum alloy material meet the design requirements, and re-execute the above steps of stirring slag removal, exhaust refining, vacuum static exhaust treatment, and sampling analysis; when the co...

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Abstract

A preparation method of aluminum alloy for a semiconductor comprises the following steps: preparing aluminum and alloy; smelting the aluminum; adding the alloy to the molten aluminum to form aluminum alloy; sequentially performing stirring, slagging off, exhausting and refining; performing vacuum standing and exhausting treatment on the aluminum alloy; sampling the aluminum alloy, and analyzing to determine whether the component ratio of the aluminum alloy meets the design requirement; if the component ratio does not meet the design requirement, adding the alloy or the aluminum again based on the analyzing result until the component ratio of the aluminum alloy meets the design requirement, and performing the steps of stirring, slagging off, exhausting, refining, vacuum standing and exhausting treatment, and sampling and analyzing; and if the component ratio meets the design requirement, casting and forming to obtain the aluminum alloy. The aluminum alloy prepared by the method is uniform in mixing of main elements, and low in impurity content, and meets the requirement on the material components of the semiconductor.

Description

technical field [0001] The invention relates to the field of alloys, in particular to a method for preparing aluminum alloys for semiconductors. Background technique [0002] Aluminum alloy is the most widely used non-ferrous metal structural material in industry, and has been widely used in aviation, aerospace, automobile, machinery manufacturing, shipbuilding and chemical industry. Among them, with the development of the semiconductor industry, the demand for high-purity aluminum products in the semiconductor manufacturing industry is increasing. [0003] At present, there is no clear standard for the application of high-end products of high-purity aluminum in my country. It is all up to the customer to put forward the corresponding procurement technical requirements, clarify the requirements for main elements, impurity elements and gas elements, and have clear requirements for crystal orientation and grains. . With the advancement and development of technology, the conte...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C1/02C22C21/00
Inventor 吴景晖姚力军张卫嘉
Owner 宁波创润新材料有限公司
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