Evaporation crucible and evaporation method thereof

A crucible and evaporation technology, which is applied in the field of vacuum evaporation, can solve the problems of material cracking, nozzle hole blockage, film thickness inaccuracy, etc., and achieve the effect of uniform temperature and avoiding hole plugging

Inactive Publication Date: 2017-05-31
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the temperature is not properly controlled and the temperature of the crucible cover is low, the vaporized molecules of the material will be deposited on the crucible cover and continue to grow, causing the nozzle holes on the crucible cover to be blocked (blocked holes)
Blockage of nozzle holes will lead to inaccurate thickness of the deposited film, affecting film quality and final product performance. Blockage of nozzle holes will lead to failure of film formation and overheating of remaining materials in the crucible. For OLED organic materials, overheating will lead to material cracking Not available
In addition, plugging will also bring inconvenience in material replacement and machine maintenance, which will affect the production progress

Method used

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  • Evaporation crucible and evaporation method thereof
  • Evaporation crucible and evaporation method thereof
  • Evaporation crucible and evaporation method thereof

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Embodiment Construction

[0025] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. Rather, the embodiments are provided to explain the principles of the invention and its practical application, thereby enabling others skilled in the art to understand the invention for various embodiments and with various modifications as are suited to particular intended uses.

[0026] In the drawings, the thicknesses of layers and regions are exaggerated for device clarity. Like reference numerals refer to like components throughout the specification and drawings.

[0027] figure 1 is a schematic cross-sectional structure diagram of an evaporation crucible according to an embodiment of the present invention.

[0028] refer to figure 1 , the evaporation crucible according to the embodiment of the...

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Abstract

The invention discloses an evaporation crucible. The evaporation crucible comprises a crucible body, a crucible cover and a heating assembly. The crucible body is used for storing an evaporation material and covered with the crucible cover; the crucible cover is provided with a plurality of spray holes which are used for making vaporized evaporation material molecules fly off; and the heating assembly is arranged on the crucible cover, does not cover the spray holes and heats the crucible cover independently. The invention further discloses an evaporation method of the evaporation crucible. By means of the evaporation crucible and the evaporation method thereof, in the evaporation process and the evaporation finishing process, the temperature of the crucible cover is always kept at the material vaporization temperature, and the temperature of the whole crucible cover is uniform, so that the vaporized material molecules are not solidified at the spray holes when passing through the spray holes, and accordingly, the phenomenon of hole blocking is avoided.

Description

technical field [0001] The invention belongs to the technical field of vacuum evaporation, and in particular relates to an evaporation crucible and an evaporation method thereof. Background technique [0002] In recent years, Organic Light Emitting Diode (OLED) has become an emerging flat-panel display product at home and abroad, because OLED displays have self-illumination, wide viewing angle (over 175°), short response time (1μs), high luminescence Efficiency, wide color gamut, low operating voltage (3-10V), thin panel (thickness can be less than 1mm), large-size and flexible panels can be produced, and simple manufacturing process, and it also has the potential of low cost. Currently mass-produced OLEDs use vacuum evaporation to prepare thin films of OLED materials. [0003] During evaporation in the vacuum evaporation chamber, the material is placed in the crucible, and the crucible is placed in the heating device. When heated to the evaporation temperature, the materia...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/243
Inventor 唐凡陈永胜
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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