Mems vibrating mirror for suppressing laser speckle and manufacturing method thereof

A laser speckle and laser technology, applied in the direction of mirrors, optics, optical components, etc., can solve the problems of light energy loss, high cost, poor process controllability, etc., to reduce the loss of light energy, reduce the loss of light energy, The effect of enhancing the inhibitory effect
CN106773102BActive Publication Date: 2019-03-26宁波勇毅科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
宁波勇毅科技有限公司
Publication Date
2019-03-26

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Abstract

The invention provides an MEMS galvanometer for inhibiting laser speckles in a laser display system and a manufacturing method of the MEMS galvanometer. An SOI (Silicon-On-Insulator) is used as a processing object of the MEMS galvanometer; the MEMS galvanometer is manufactured by micro-processing technologies such as photoetching, etching and coating and mainly comprises a reflective mirror, a resonance suspension girder, driving comb teeth, detecting comb teeth and the like. Tiny waving features which are distributed randomly are designed on the surface of the reflective mirror, and a function of inhibiting the speckles is fulfilled by interfering laser phase while laser reflection is realized. The driving comb teeth, the detecting comb teeth and the resonance beam structure which are matched with the reflective mirror are designed on the reflective mirror, by electrostatic drive of the comb teeth, in-plane vibration of the reflective mirror can be realized, the contrast ratio of the speckles is reduced due to time average by stacking of speckle images in human visual retention time, and the speckle inhibiting effect of the device is improved. The laser speckle inhibiting device in an MEMS galvanometer mode has the characteristics of high reliability, low energy consumption, obvious speckle inhibiting effect, simplicity in processing, easiness in large-scale production and the like.
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Description

【Technical Field】

[0001] The invention relates to the field of laser projection display, in particular to a MEMS galvanometer for suppressing laser speckle and a manufacturing method thereof. 【Background technique】

[0002] Compared with traditional display technology, laser projection display technology has a wider color gamut and is easy to obtain vivid and vivid images. It has ultra-high brightness and contrast and can easily improve the quality of the display. It also has long life, low power consumption and reliability. High, energy-saving and environmentally friendly, it is a very competitive display technology. One of the main application obstacles in laser display is the phenomenon of laser speckle. The laser light source has high coherence, and the diffusely reflected light generated by the laser light source irradiating the rough screen will cause serious interference in the spatial optical path and form obvious interference fringes. Because the roughness of the scree...

Claims

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