Large-aperture complex curved surface optical parameter accurate testing and calibrating device and method

Abstract

The invention discloses a large-aperture complex curved surface optical parameter accurate testing and calibrating device and method. The device is used for testing and calibrating a complex curved surface, a testing and calibrating module is used for acquiring the surface shape of the complex curved surface detected by a laser interferometer and transmitting control signals to the laser interferometer, a compensation element and an adjusting mechanism of the complex curved surface to be detected, the adjusting mechanism is controlled to adjust relative positions and relative angles of the laser interferometer, the compensation element and the complex curved surface, so that the root-mean-square error of the surface shape of the complex curved surface is minimum, and the defocusing amount is zero. A transformation matrix calibrating mechanism is used for calibrating a coordinate transformation matrix of a laser tracker in the station transfer process. Coordinates of surface shape data are transformed into the same coordinate system based on the coordinate transformation matrix. All surface shape data in the same coordinate system are subjected to modeling analysis and calculated, design results of an optical checking compensator for the complex curved surface to be detected are further optimized, and the optimized results are optimal design results of the optical checking compensator based on measured parameters of a mirror.

Description

technical field [0001] The invention relates to the technical field of complex curved surface detection, in particular to a device and method for accurately testing and calibrating optical parameters of large-diameter complex curved surfaces. Background technique [0002] Large-aperture complex curved surfaces are important components of modern optical systems. In the manufacturing process of complex curved surfaces, geometric parameters such as vertex curvature radius, off-axis amount and eccentricity are important parameters to describe reflective surfaces, and accurate testing and calibration of its optical parameters are the key to ensuring its quality during the development process. [0003] At present, the methods for measuring the optical parameters of complex curved surfaces are mainly two methods: measuring with a steel ruler or a spacer rod of known length, and using a laser tracker for direct measurement. When measuring with a steel ruler or a spacer rod of known...

AI Technical Summary

Problems solved by technology

When measuring with a steel ruler or a spacer rod of known length, the method of estimation is adopted. The accuracy of the steel ruler and the measuring rod is low and the apex position of the large-caliber complex surface cannot be accurately measured, resulting in low accuracy of the measurement method; When using a laser tracker for direct measurement, only a part of the reference plane of the compensation element and the complex curved surface can be measured. Due to the lack of reference plane information, the accidental factors in the test process will be amplified, resulting in a decrease in the accuracy of the optical parameter test

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