Large-aperture complex curved surface optical parameter accurate testing and calibrating device and method

A technology of complex curved surfaces and optical parameters, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of inability to accurately measure the position of the apex, the reduction of the accuracy of optical parameter testing, the low accuracy of steel rulers and measuring rods, and achieve the cost of testing Low cost, easy operation and good versatility

Active Publication Date: 2017-06-13
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Application Information

AI Technical Summary

Problems solved by technology

When measuring with a steel ruler or a spacer rod of known length, the method of estimation is adopted. The accuracy of the steel ruler and the measuring rod is low and the apex position of the large-caliber complex surface cannot be accurately measured, resulting in low accuracy of the measurement method; When using a laser tracker for direct measurement, only a part of the reference plane of the compensation element and the complex curved surface can be measured. Due to the lack of reference plane information, the accidental factors in the test process will be amplified, resulting in a decrease in the accuracy of the optical parameter test

Method used

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  • Large-aperture complex curved surface optical parameter accurate testing and calibrating device and method
  • Large-aperture complex curved surface optical parameter accurate testing and calibrating device and method
  • Large-aperture complex curved surface optical parameter accurate testing and calibrating device and method

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Embodiment 1

[0030] Embodiment 1, as figure 1 As shown, the device for accurate testing of the optical parameters of the large-caliber complex curved surface of the present invention includes: a laser tracker such as figure 1 As shown in positions 1 and 2, the laser interferometer 3, the compensating element 4, the complex curved surface to be tested 5, the adjustment mechanism 6, the adjustment mechanism 7, the adjustment mechanism 8 and the test calibration module.

[0031] Such as figure 2 As shown, the device of the present invention for establishing a transformation matrix between two laser trackers includes a laser tracker figure 2 As shown in position 1 and position 2, ball seat 9, ball seat 10, ball seat 11, ball seat 12.

[0032] combine figure 1 with figure 2 To illustrate the specific implementation of the present invention, the large-caliber complex curved surface optical parameter accurate test and calibration device tests and calibrates the complex curved surface 5 to ...

Embodiment 2

[0039] Embodiment 2, the method for testing and calibrating the large-diameter complex curved surface optical parameters accurate test and calibrating device as in embodiment 1, the method specifically includes the following steps:

[0040] Step 1) Adjust the relative position and relative angle of the first adjustment mechanism 6, the second adjustment mechanism 7 and the third adjustment mechanism 8, so that the root mean square error of the surface shape of the complex curved surface detected by the laser interferometer 3 is the smallest and defocused amount is zero;

[0041] Step 2) Place the laser tracker in N positions in turn, and the laser tracker tests the reflective surface of the complex curved surface 5 to be tested and the surface shape data of all measurable reference planes at each position, and tests the fixed M balls The coordinates of the target ball position of the seat;

[0042] Step 3) based on the target ball position coordinates measured in step 2), est...

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Abstract

The invention discloses a large-aperture complex curved surface optical parameter accurate testing and calibrating device and method. The device is used for testing and calibrating a complex curved surface, a testing and calibrating module is used for acquiring the surface shape of the complex curved surface detected by a laser interferometer and transmitting control signals to the laser interferometer, a compensation element and an adjusting mechanism of the complex curved surface to be detected, the adjusting mechanism is controlled to adjust relative positions and relative angles of the laser interferometer, the compensation element and the complex curved surface, so that the root-mean-square error of the surface shape of the complex curved surface is minimum, and the defocusing amount is zero. A transformation matrix calibrating mechanism is used for calibrating a coordinate transformation matrix of a laser tracker in the station transfer process. Coordinates of surface shape data are transformed into the same coordinate system based on the coordinate transformation matrix. All surface shape data in the same coordinate system are subjected to modeling analysis and calculated, design results of an optical checking compensator for the complex curved surface to be detected are further optimized, and the optimized results are optimal design results of the optical checking compensator based on measured parameters of a mirror.

Description

technical field [0001] The invention relates to the technical field of complex curved surface detection, in particular to a device and method for accurately testing and calibrating optical parameters of large-diameter complex curved surfaces. Background technique [0002] Large-aperture complex curved surfaces are important components of modern optical systems. In the manufacturing process of complex curved surfaces, geometric parameters such as vertex curvature radius, off-axis amount and eccentricity are important parameters to describe reflective surfaces, and accurate testing and calibration of its optical parameters are the key to ensuring its quality during the development process. [0003] At present, the methods for measuring the optical parameters of complex curved surfaces are mainly two methods: measuring with a steel ruler or a spacer rod of known length, and using a laser tracker for direct measurement. When measuring with a steel ruler or a spacer rod of known...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441G01B21/042
Inventor 张学军程强薛栋林陈新东李锐钢
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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