Cooling plate and evaporation device

Abstract

The invention discloses a cooling plate and an evaporation device. The cooling plate comprises a plate body; a plurality of cooling pipelines which are connected in parallel, arranged in the plate body at intervals and used for cooling the plate body region by region; and a plurality of flow valves connected to the cooling pipelines in a one-to-one correspondence manner and used for adjusting flows of cooling liquid in the plurality of cooling pipelines in the one-to-one correspondence manner. According to the cooling plate provided by the invention, the plurality of cooling pipelines which are connected in parallel are arranged in the plate body at intervals, the plurality of cooling pipelines and the plurality of flow valves are connected in the one-to-one correspondence manner, the plurality of parallel cooling pipelines are used for cooling the plate body region by region, and the plurality of flow valves are used for adjusting the flows of the cooling liquid in the plurality of cooling pipelines in the one-to-one correspondence manner, such that the respective regions on the plate body are consistent in temperature, it is ensured that the different regions of a mask are uniform in deformation when the cooling plate is applied to an evaporation device, and the evaporation precision of a glass substrate can be higher.

Description

technical field [0001] This article involves but is not limited to liquid crystal display technology, especially a cooling plate and an evaporation device. Background technique [0002] After nearly 30 years of development, organic electroluminescent devices (English full name Organic Light Emitting Device, referred to as OLED) as the next generation of lighting and display technology, has a wide color gamut, fast response, high contrast, etc., has been used in lighting and Display has been widely used. The current OLED mainly uses the vacuum evaporation coating method (referred to as the vacuum evaporation method) to prepare the organic light-emitting layer. The vacuum evaporation coating method is to heat the evaporation material through the evaporation source in the vacuum evaporation chamber to make the evaporation material Atoms or molecules vaporize and escape to form a vapor flow, which is incident on the surface of the substrate to be evaporated (ie: glass substrate...

AI Technical Summary

Problems solved by technology

However, since the outer ring of the mask plate is a 10-50 mm thick stainless steel frame (ie: mounting frame), the inside of the mask plate is 20-50 microns thick Invar alloy (ie: Invar alloy), and the surface of the Invar alloy has different sizes. One opening, so the temperature of different regions on the whole mask is different when heated. After using the existing cooling plate to cool down, there will still be temperature differences in different regions on the mask, resulting in different deformations in different regions of the mask and affecting evaporation. precision

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