Inductor and forming method thereof
A technology for inductors and dielectric layers, applied in transformer/inductor cores, inductance/transformer/magnet manufacturing, inductors with magnetic cores, etc., can solve the problems of size reduction, inductor inductance limitation, etc., and achieve Increased inductance, improved efficiency, and improved magnetic permeability
Active Publication Date: 2017-06-27
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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Problems solved by technology
However, with the continuous development of semiconductor technology, the size of the device is also decreasing, and the increase of the inductance of the inductor is also limited accordingly.
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[0016] It can be seen from the background art that with the continuous reduction of the device size, the increase of the inductance of the inductor is correspondingly limited, which makes it difficult to improve the quality factor (ie, Q value) of the inductor and the efficiency of the inductor is low.
[0017] In order to solve the technical problem, the present invention provides an inductor with a ferromagnetic core, the metal layer of the inductor surrounds the ferromagnetic core along the extension direction of the ferromagnetic core; in the role of the ferromagnetic core In this way, the magnetic permeability of the inductor is improved, and the magnetic field of the inductor is concentrated at the center, thereby increasing the inductance of the inductor, further improving the quality factor of the inductor, and improving the efficiency of the inductor.
[0018] In order to make the above objects, features and advantages of the present invention more comprehensible, spec...
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Abstract
Provided is an inductor and a forming method thereof. The inductor comprises a substrate, a strip-shaped ferromagnetic core and a solenoid-shaped metal layer, wherein a dielectric layer is arranged on the substrate, the ferromagnetic core is located in the dielectric layer, the metal layer is located in the dielectric layer and surrounds the ferromagnetic core in the extending direction of the ferromagnetic core, and the dielectric layer is located between the metal layer and the ferromagnetic core. The inductor comprises the strip-shaped ferromagnetic core and the solenoid-shaped metal layer, and the metal layer surrounds the ferromagnetic core in the extending direction of the ferromagnetic core. Under the effect of the ferromagnetic core, the magnetic permeability of the inductor is improved, a magnetic field of the inductor converges at the central position, accordingly the inductance of the inductor is improved, further the quality factor of the inductor is improved, and the efficiency of the inductor is improved.
Description
technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to an inductor and a forming method thereof. Background technique [0002] The main function of the inductor is to isolate and filter the AC signal, or to form a resonant circuit with capacitors and resistors. The use of inductors in chip manufacturing is becoming more and more common due to the important roles they play such as in portable electronics, wireless and radio frequency applications. [0003] Currently, spiral inductors are generally used, that is, metal wires are used to form a spiral inductor, and the spiral structure of the inductor can generate inductance. However, with the continuous development of semiconductor technology, the size of the device is also continuously reduced, and the increase of the inductance of the inductor is correspondingly limited. [0004] Therefore, it is urgent to provide an inductor to increase the inductance of the inductor. ...
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Login to View More IPC IPC(8): H01F17/04H01F27/25H01F27/28H01F27/32H01F41/04H01F41/12
CPCH01F17/04H01F27/25H01F27/2804H01F27/324H01F41/042H01F41/125H01F2027/2809
Inventor 刘玮荪
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP