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A stress-strain assisted pyroelectric composite material and its application

A technology of stress-strain and composite materials, which is applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve the problems of small pyroelectric coefficient, achieve the effect of enhancing the change of electric polarization intensity, improving the pyroelectric coefficient, and good application prospects

Active Publication Date: 2018-10-19
NINGBO INNOVATION CENT FOR APPLIED MAGNETICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the traditional pyroelectric mode, the working temperature is below the Curie temperature, no thermostat is required, and no bias voltage is required, but the pyroelectric coefficient is small, generally 10 -8 C / cm 2 · K order of magnitude

Method used

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  • A stress-strain assisted pyroelectric composite material and its application
  • A stress-strain assisted pyroelectric composite material and its application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0034] In this example, if figure 1 As shown, the stress-strain assisted pyroelectric composite material includes a stress-strain application layer 1, a lower conductive layer 2 located on the stress-strain application layer 1, a pyroelectric layer 3 located on the lower conductive layer 2, and a pyroelectric layer located on the Upper conductive layer 4 on layer 3.

[0035] The stress-strain application layer 1 is BaTiO 3 Single crystal, forms substrate support and provides stress-strain application function. The lower conductive layer 2 is SrRuO 3 film. The pyroelectric layer 3 is antiferroelectric Pb(ZrTi)O 3 film. The upper conductive layer 4 is metal Cu.

[0036] BaTiO 3 The single crystal forms the substrate support and provides the stress-strain application function.

[0037] SrO 3The thin film forms the lower conductive layer and has the function of transferring stress and strain, with a thickness of 10-100 nm, which is 16 nm in this embodiment.

[0038] Meta...

Embodiment 2

[0053] In this embodiment, the structure of the stress-strain assisted pyroelectric composite material is basically the same as in Embodiment 1, the difference is that in this embodiment, the pyroelectric layer 3 is antiferroelectric PbHfO 3 film.

[0054] The preparation method of the above-mentioned stress-strain assisted pyroelectric composite material is as follows:

[0055] (1) Antiferroelectric PbHfO 3 Target preparation

[0056] According to the chemical molecular formula, mix appropriate amount of PbO and HfO2 and grind evenly, and pre-fire at 800°C for 2 hours; after pre-burning, grind again, then press into a target, and fire at 1000°C for 2 hours to obtain antiferroelectric PbHfO 3 target.

[0057] (2) Film preparation

[0058] BaTiO 3 The single crystal substrate substrate is placed in a vacuum chamber, heated to 800°C, and then 10Pa oxygen is introduced, and the BaTiO 3 Deposition of SrRuO with a thickness of 16 nm on a single crystal substrate 3 thin film...

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Abstract

The invention provides a stress strain-assisted pyroelectric composite material. The composite material combines a pyroelectric material layer and a stress strain material layer; when the pyroelectric layer senses outside temperature changes caused by infrared light and changes of electric polarization happens, a stress strain applying layer generates stress strain under effects of outside conditions and the stress strain is transmitted to the pyroelectric layer, the changes of the electric polarization of the pyroelectric layer is thus enhanced, and a pyroelectric coefficient is improved. When the pyroelectric composite material is applied to the technical field of infrared detection, the detection sensitivity can be improved effectively, and the application prospect in the technical field of infrared detection is thus good.

Description

technical field [0001] The invention relates to the technical field of pyroelectric materials, in particular to a stress-strain assisted pyroelectric composite material and its application. Background technique [0002] Infrared detectors are a type of sensors widely used in military, industrial, medical, environmental and many other fields. According to their different detection principles, they can be divided into two categories: photon detectors and thermal detectors. [0003] Photon detectors are based on the photoelectric effect, and have the advantages of strong wavelength selectivity, high signal-to-noise ratio, and fast response speed, so they are mainly used in military fields such as aerospace, missile guidance, and infrared night vision. However, photon-type detectors need to work at low temperatures (about 200K), and must be equipped with expensive and bulky refrigeration equipment, thus restricting their expansion to the civilian field. [0004] Thermal infrare...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/0264
CPCH01L31/0264
Inventor 陈斌左正笏刘宜伟詹清峰李润伟
Owner NINGBO INNOVATION CENT FOR APPLIED MAGNETICS CO LTD
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