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Mg2SiO4-Li2TiO3 compound system LTCC (low-temperature co-fired ceramic) material and preparation method thereof

A system and raw material technology, applied in the field of microwave electronic ceramic materials and its manufacturing, can solve problems such as high sintering temperature, failure to meet application requirements, and large deviation of resonance frequency temperature coefficient from zero, etc., to achieve high application prospects and value

Active Publication Date: 2017-06-30
UNIV OF ELECTRONIC SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

Also due to its high sintering temperature and resonant frequency temperature coefficient τ f The large deviation from zero makes it unsuitable for LTCC application requirements

Method used

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  • Mg2SiO4-Li2TiO3 compound system LTCC (low-temperature co-fired ceramic) material and preparation method thereof
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Embodiment Construction

[0023] The present invention will be described in further detail below with reference to the accompanying drawings.

[0024] Step 1: Combine analytically pure MgO and SiO 2 Molar ratio MgO:SiO 2 = 2:1 Weighing and configuring raw materials; ball mill the prepared raw materials once to mix the raw materials evenly, add deionized water according to the mass ratio of powder and deionized water at 1:1, and ball mill for 4 hours at the ball milling speed of 300rpm. After ball milling, dry the powder at 120°C for later use.

[0025] Step 2: Pass the dried powder obtained in Step 1 through a 60-mesh sieve, put it into a crucible for compaction after sieving, and heat it up to 1350°C at a rate of 2°C / min for pre-burning, keep it warm for 4 hours, and cool with the furnace get Mg 2 SiO 4Pre-fired.

[0026] Step 3: Add analytically pure Li 2 CO 3 and TiO 2 Moore Billy 2 CO 3 :TiO 2 = 2:1 Weighing and configuring raw materials; ball mill the prepared raw materials once to mix ...

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Abstract

The invention belongs to the field of microwave electronic ceramic materials and manufacture thereof, and particularly relates to an Mg2SiO4-Li2TiO3 compound system LTCC (low-temperature co-fired ceramic) material and a preparation method thereof. The LTCC material is based on a compound system of Mg2SiO4 and Li2TiO3 and acquired by a solid phase method, the sintering temperature of the material ranges from 800 DEG C to 950 DEG C and is lower than 960 DEG C (Ag melting point), epsilon r=9.0-18.0, the material has high Qf value of 50000-250000GHz and nearly-zero tau f=-15-15ppm / DEG C, and the material has high application prospects and values and can be widely applied to LTCC substrates, laminated microwave devices and modules.

Description

technical field [0001] The invention belongs to the field of microwave electronic ceramic materials and their manufacture, and relates to a kind of f ~0ppm / °C) and high Q f Low temperature co-fired ceramic (Low Temperature Co-fired Ceramic, LTCC) material and preparation method thereof, specifically a kind of Mg 2 SiO 4 -Li 2 TiO 3 Composite system LTCC material and its preparation method. Background technique [0002] With the development of microelectronics technology, LTCC technology has received extensive attention. LTCC technology is widely used in national defense industry, automobiles and information products. Its biggest feature is that LTCC materials can be sintered at low sintering temperatures (<960°C). [0003] With the development of microwave communication technology and radar system, the available communication frequency is extended from microwave to millimeter wave. The high-end microwave communication frequency and the large amount of information ...

Claims

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Application Information

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IPC IPC(8): C04B35/462
CPCC04B35/462C04B2235/3445C04B2235/602C04B2235/606C04B2235/656C04B2235/6562C04B2235/6567C04B2235/95
Inventor 苏桦赖元明唐晓莉张怀武荆玉兰李元勋
Owner UNIV OF ELECTRONIC SCI & TECH OF CHINA
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