Linear partial motive sealing moving mechanism provided with X-ray protection function
A motion mechanism, linear motion technology, applied in the field of seal motion mechanism, linear partial dynamic seal motion mechanism, can solve the problems of increasing vacuum pump power, increasing space, increasing cost, etc., to reduce the amount of seal compression, reduce motion resistance, The effect of reducing the sealing resistance
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[0037] The present invention will be further described in detail below in conjunction with the accompanying drawings, but the protection scope of the present invention is not limited thereto.
[0038] Such as Figure 1 to Figure 4 As shown, a linear partial dynamic seal motion mechanism with X-ray protection, the motion mechanism includes: a certain carriage 9, the fixed carriage 9 and the fixed guide rail 8 are connected by studs, and the The upper part of the fixed carriage 9 is provided with a movable carriage 12, and a movable guide rail 11 is installed below the movable carriage 12, and the movable carriage 12 is supported by rollers 10, so that the movable carriage 12 and the fixed carriage 9 The gap between 0.2-0.5mm is kept between, and the electron gun 4 is fixedly arranged on the moving carriage 12, and the electron gun 4 can move linearly along with the moving carriage 12; A stacked telescopic lead protection system 5 is arranged in the groove inside the plate 9, t...
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