High-sensitivity microphone based on quartz crystal resonator

Abstract

The invention discloses a high-sensitivity microphone based on a quartz crystal resonator, which is on the basis of a force-frequency effect of the quartz crystal resonator, that is, if an oscillator of the quartz crystal resonator is subjected to the effect of a force or strain, the resonant frequency of the resonator changes in a linear manner along with changes of the force. The core of the invention is that a vibration diaphragm generates vibrations according to the size of pressure and different frequencies when being subjected to the pressure of sound waves, the vibration is converted into strain through a mechanical structure and acts on a quartz crystal, the quartz crystal resonator is enabled to generate frequency deviation so as to accomplish sound-electricity conversion, a vibration parameter of the diaphragm can be acquired through measuring the frequency deviation, and transmitted sound wave information can be further acquired. The microphone disclosed by the invention has the characteristics of high sensitivity, large frequency response range and small volume.

Description

technical field [0001] The invention belongs to the field of microphones, in particular to a high-sensitivity microphone based on a quartz crystal resonator. Background technique [0002] In the field of electroacoustics, the traditional microphone is an electret condenser microphone. Its main principle is to convert external sound signals into electrical signals through the formation of capacitance between the electret film and the diaphragm or back electrode. The electret condenser microphone has a simple structure and is easy for industrial production, so the price is low. However, the structure of the electret condenser microphone has a large rear cavity, so the thickness is relatively large, which cannot meet the needs of thinning consumer electronic products. In recent years, a new type of silicon microphone, microelectromechanical system (MEMS) microphone, has greater advantages than traditional microphones in terms of performance and volume. However, the sensitivity...

AI Technical Summary

Problems solved by technology

However, there is a large back chamber in the structure of the electret condenser microphone, so the thickness is relatively large, which cannot meet the thinning requirements of consumer electronics products.

In recent years, a new type of silicon microphone, microelectromechanical system (MEMS) microphone, has greater advantages compared with traditional microphones in terms of performance and volume. However, the sensitivity of MEMS piezoelectric microphones is currently low, which hinders its application development.

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