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Compensation method of organic light emitting diode evaporation coating

A technology of light-emitting diodes and vapor-deposited films, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of low production efficiency and poor operability, reduce the number of changes and improve operability , the effect of process stability

Active Publication Date: 2017-07-28
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0036] The invention provides a method for compensating an organic light-emitting diode evaporation film, which is used to solve the technical problems of poor operability, multiple parameter changes and low production efficiency in the above-mentioned production process

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  • Compensation method of organic light emitting diode evaporation coating
  • Compensation method of organic light emitting diode evaporation coating
  • Compensation method of organic light emitting diode evaporation coating

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Embodiment Construction

[0072] The present invention will be further described below in conjunction with accompanying drawing.

[0073] The invention provides a method for compensating the evaporated film of an organic light-emitting diode, that is, by changing the Z value (Z-ratio) method to approximate and simulate the law of the film thickness and the frequency change of the crystal oscillator when the crystal oscillator starts to be used, and then adjust the Z value After the modification, the number of times to change the correction value is greatly reduced, and the operability in the production process is better.

[0074] For example, when the Z value is 1, the correction value is 20%, and the life cycle of the crystal oscillator is 0, the target film thickness of evaporation The film thickness, the actual measured film thickness is

[0075] The Z value is 1, the correction value is 20%, and when the life cycle of the crystal oscillator is 3, the evaporation target film thickness The film...

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Abstract

The invention relates to a compensation method of an organic light emitting diode evaporation coating, relates to the technical field of vacuum evaporation, and solves the technical problems that in the prior art, operability is poor, parameters require to be changed for multiple times and production efficiency is low during the production process. The method is characterized in that different Z values are adopted during evaporation of quartz vibrators in different lift cycles, and after modification values are correspondingly regulated, evaporation of the next life cycle is carried out, so that parameters requiring to be changed during the production process can be greatly decreased; and besides, the variation trend between the practical coating thickness and frequency of a transistor tends to be linear, so that quality of a product is more reliable, qualification rate of the product can be increased, and production efficiency of the product can be improved.

Description

technical field [0001] The invention relates to the technical field of vacuum evaporation, in particular to a method for compensating an organic light emitting diode evaporation film. Background technique [0002] The process of vacuum evaporation of organic materials requires precise control of the thickness of each film layer to ensure that the evaporated devices can be qualified. A thin quartz disc, one side is fully plated, the other side is plated into a keyhole shape, placed in the probe fixture and forms a complete path, connected to the oscillator, and the film thickness is monitored by the change of the natural frequency on the crystal oscillator. The crystal oscillator is based on the change of the natural frequency of the crystal oscillator to convert the thickness of the evaporated organic material on the crystal oscillator. When the thickness of the evaporated film is much smaller than that of the crystal oscillator, the natural frequency of the crystal oscillat...

Claims

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Application Information

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IPC IPC(8): C23C14/54H01L51/56
CPCC23C14/546H10K71/164H10K71/00
Inventor 裴龙
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD