A low-stiffness magnetic levitation gravity compensator and micro-motion table structure

Abstract

The invention belongs to the technical field of a relevant gravity compensation structure and discloses a low-rigidity magnetic suspension gravity compensator. The low-rigidity magnetic suspension gravity compensator comprises a rotor structure and a stator structure, wherein the rotor structure comprises an external permanent-magnet array ring, an internal permanent-magnet array ring and a rotor support frame, wherein the external permanent-magnet array ring and the internal permanent-magnet array ring are respectively arranged at two opposite side walls of an annular groove of the rotor support frame, the thickness of the internal permanent-magnet array ring is larger than the thickness of the external permanent-magnet array ring, the stator structure comprises a coil support and a stator permanent-magnet ring, the coil support is accommodated in the annular groove, the stator permanent-magnet ring is embedded onto the coil support, the height of the stator permanent-magnet ring is larger than the thickness thereof, and the distance between the stator permanent-magnet ring and the internal permanent-magnet array ring is smaller than the distance between the stator permanent-magnet ring and the external permanent-magnet array ring. The invention also provides a micro stage structure comprising the magnetic suspension gravity compensator. By the magnetic suspension gravity compensator, near-zero rigidity magnetic suspension of the rotor structure within a relatively wide movement range is achieved; and moreover, the magnetic suspension gravity compensator is simple in structure and wide in application range.

Description

Technical field [0001] The invention belongs to the technical field related to gravity compensation structures, and more specifically, relates to a low-rigidity magnetic levitation gravity compensator and a micro-moving table structure. Background technique [0002] In many advanced industrial equipment, it is necessary to realize the six-degree-of-freedom movement of the moving parts and to accurately position them, such as the mask table and the workpiece table in the lithography machine, and the Z-direction actuator mostly uses Lorentz coils Or electromagnet, they use Lorentz force or magnetic resistance to control the normal deflection and pitch deflection of the moving parts. For the ultra-precision positioning of the workpiece stage in the lithography machine, how to prevent the micro-motion stage components carrying the silicon wafers from the interference caused by the vibration of the base frame during the exposure process is very important. Therefore, it is necessary to...

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Problems solved by technology

[0004] At present, those skilled in the art have done some research. For example, the patent CN104847825A discloses an array type magnetic levitation gravity compensator. The array type magnetic levitation gravity compensator includes two stator structures and a mover structure. The mover structure exerts magnetic attraction force and magnetic repulsion force on the mover mechanism from the upper and lower sides of the mover structure respectively to realize the gravity compensation of the mover structure; however, the array type maglev gravity compensator higher normal stiffness

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