Shale pore quantitative expression method based on three-dimensional FIB-SEM image
A FIB-SEM, quantitative characterization technology, applied in image enhancement, image analysis, image data processing, etc., can solve problems that cannot truly reflect the distribution of organic pores and inorganic pores in three-dimensional space, and achieve high accuracy and simple method Effect
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[0062] In this embodiment, pore analysis is performed on shale samples, including the following steps:
[0063] 1. FIB-SEM to acquire images
[0064] FIB-SEM is a dual-beam system that integrates the imaging function of scanning electron microscope (SEM) and the cutting function of focused ion beam (FIB). High-precision 3D imaging. The imaging principle is: the sample surface is kept perpendicular to the ion beam; the FIB ion beam is used to etch the sample surface to expose the observation surface, and the SEM electron beam is used to scan the observation surface to collect secondary electrons or backscattered electrons to obtain high resolution. Imaging; then according to the requirements of the ablation thickness, set the ion beam energy parameters to ablate the observation surface, use the electron beam to image the new observation surface after ablation, and repeat this step until the imaging is completed. The end result is a sequence of images.
[0065] The images obt...
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