Laser-induced oxidation auxiliary micro milling method and device thereof

Abstract

The invention discloses a laser-induced oxidation auxiliary micro milling method and a device thereof. According to oxidable characteristics of a material to be machined, a low-power laser device is used for heating the material in the to-be-machined area, auxiliary oxidizing gas is led to serves as an oxidizing agent, instant high temperature generated by the laser is used for enabling the material in the to-be-machined area and the oxidizing agent to have the rapid controllable oxidizing reaction, through adjusting of laser and oxidizing agent parameters, the oxidizing reaction rate, the oxide microstructure and the structure are controlled, an oxidizing layer is formed on the surface of a workpiece to be machined, the micro milling removing mechanism of the material is changed, the cutting load is reduced, a micro milling cutter is used for rapidly removing the oxide layer and the small number of subsurface stratum materials, and the high-precision machined surface is formed; the higher machining efficiency and the better surface integrality are obtained, and the processing controllability is high; the machining method is used for achieving efficient and high-quality machining of high depth-to-width ratio microstructures of titanium alloy, hard alloy and other materials hard to machine.

Description

Technical field: [0001] The invention relates to a laser-induced oxidation-assisted micro-milling processing method and a device thereof, which belong to the field of micro-processing. Background technique: [0002] High aspect ratio microstructures have great application requirements in the fields of national defense, aerospace, energy power, biomedicine, automobiles and electronics. However, many existing microfabrication technologies, such as photolithography, microelectromachining, reactive ion deep etching, and focused ion beam processing, are not only limited by materials, but also difficult to meet the requirements of high aspect ratio microstructure processing accuracy and surface integrity. . Micro-milling technology has the advantages of diverse machinable materials, controllable processing accuracy, low cost, and strong flexibility. It can realize the processing of micro-structures on true three-dimensional free-form surfaces, and can theoretically solve the proc...

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Problems solved by technology

[0004] The purpose of the present invention is to propose a laser-induced oxidation-assisted micro-milling processing method and its device to solve the problems of low tool life, low processing efficiency, poor surface integrity and low process controllability in the micro-milling process of high aspect ratio microstructures And other issues

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